Electronic Devices and Semiconductor Manufacturing Commons^™

Rapid Prototyping Of Nanostructures With Electron Beam Induced Processing, Samaneh Esfandiarpour

Theses and Dissertations--Electrical and Computer Engineering

Focused electron beam induced processing (FEBIP) is a nano-scale fabrication technique that allows the direct deposition of functional materials. However, it suffers from significant drawbacks, such as high cost, low speed, unavailable precursors for many materials and low purity of deposits. Liquid-phase focused electron beam induced processes (LP-FEBIP) are being investigated due to the potential benefits over the gas phase technique. In this method, deposition or etching occurs at the interface between a substrate and a bulk liquid. In this work, electron beam induced deposition of copper nanostructures from aqueous solutions of copper sulfate is demonstrated. The addition of sulfuric …