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Articles 1 - 4 of 4
Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
Piezo-Electrochemical Transducer Effect (Pect) Intercalated Graphite Micro-Electromechanical Actuators, Glen A. Kading
Piezo-Electrochemical Transducer Effect (Pect) Intercalated Graphite Micro-Electromechanical Actuators, Glen A. Kading
Theses and Dissertations
The purpose of this research is to investigate the Piezo-Electrochemical Transducer (PECT) effect in intercalated graphite as a possible mechanism of actuation for micro-electromechanical systems (MEMS). This dissertation presents the results of research into the PECT effect in H2SO4-intercalated graphitized carbon fibers, including both electrical and mechanical characteristics of this effect. PECT fibers achieve up to 1.7% strain at 1.4 V of applied potential. In contrast, the piezoelectric material polyvinylidene difluoride (PVDF) generates only 0.01% strain and polysilicon thermal expansion between 0.02 and 0.06% strain depending on the thermal conductivity of the particular polysilicon that the actuators are fabricated in. …
Hybrid Micro-Electro-Mechanical Tunable Filter, Edward M. Ochoa
Hybrid Micro-Electro-Mechanical Tunable Filter, Edward M. Ochoa
Theses and Dissertations
While advantages such as good thermal stability and processing-chemical compatibilities exist for common monolithic-integrated micro-electro-mechanically tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MT-VCSEL), they often require full processing to determine device characteristics. Alternatively, the MEM actuators and the optical parts may be fabricated separately, then subsequently bonded. This "hybrid approach" potentially increases design flexibility. Since hybrid techniques allow integration of heterogeneous material systems, "best of breed" compound optoelectronic devices may be customized to enable materials groups to be optimized for tasks they are best suited. Thus, as a first step toward a hybrid (AlxGa1- …
Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy
Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy
AFIT Patents
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results …
Investigation Of Gate Current In Neutron Irradiated AlXGa1-XN/Gan Heterogeneous Field Effect Transistors Using Voltage And Temperature Dependence, Thomas E. Gray
Theses and Dissertations
The gate current of Al27Ga73N/GaN heterogeneous field effect transistors (HFETs) is investigated using current-voltage (IV) and current-temperature (IT) measurement demonstrating that trap assisted tunneling (TAT) is the primary current mechanism. A thermionic trap assisted tunneling (TTT) model is used with variables of Schottky barrier height, trap energy, donor density and trap density. This results in a sigma of 1.38x10-8 A for IT data measured between 85K and 290K and for IV data measured between 0.0 V and -4.0 V. High energy (>0.5 MeV) neutron irradiation confirms an increase of gate current with fluence. An …