Electronic Devices and Semiconductor Manufacturing Commons^™

Structural, Electrical And Thermoelectric Properties Of Chromium Silicate Thin Films, Makram Abd El Qader

UNLV Theses, Dissertations, Professional Papers, and Capstones

Thermoelectric devices can generate electrical power as a result of their ability to produce electrical currents in the presence of thermal gradients. They can also produce refrigerative cooling when electrical power is supplied to them. Among the potential semiconducting silicides, CrSi ₂ is attractive because of its high thermal and chemical stability and its potential for thermoelectric application. CrSi₂ /SiO₂ thin-film structures were prepared using RF sputtering. As deposited and annealed (300°C to 600°C) thin films were characterized for their structural, electrical, and thermoelectric transport properties. As-sputtered CrSi ₂ film is amorphous at room temperature and crystallizes around …