Electrical and Computer Engineering Commons^™

Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.

Ghz Range Nanoscaled Aln Contour-Mode Resonant Sensors (Cmr-S) With Self-Sustained Cmos Oscillator, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency read-out. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/µm2 and a fast response time (<1 >ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) …

Ghz Range Nanoscaled Aln Contour-Mode Resonant Sensors (Cmr-S) With Self-Sustained Cmos Oscillator, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Chengjie Zuo

This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency read-out. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/µm2 and a fast response time (<1 ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) as low as 1.5 ppb (4.7 ag/µm2) is experimentally verified.

Polyenvi, Stephen Beard, Josh Engel, Paul Fake, Diego Flores, Alvaro Nunez, Miguel Wong

Electrical Engineering

Poor indoor air quality is a problem that is recognized by the Environmental Protection Agency (EPA) to cause health issues. In order to raise awareness of this problem, this document outlines the construction of a device that economically measures air quality through five metrics: dust, smoke, ozone, humidity, and temperature. The device integrates with a router to provide users access to information about their indoor air quality anywhere over the internet as well as local access to the data via an LCD mounted on the router. By increasing indoor air quality awareness, this device will aid users in making adjustments …

Design And Simulation For Encoded Pn-Ofc Saw Sensor Systems, John Pavlina

Electronic Theses and Dissertations

Surface acoustic wave (SAW) sensors provide versatility in that they can offer wireless, passive operation in numerous environments. Various SAW device embodiments may also be employed for retrieval of the sensed data. Single sensor systems typically use a single carrier frequency and a simple device embodiment since tagging is not required. However, it is necessary in a multi-sensor environment to both identify the sensor and retrieve the information. Overlapping sensor data signals in time and frequency present problems when attempting to collect the sensed data at the receiver. This dissertation defines a system simulation environment exclusive to SAW sensors. The …

Ss-Dna Functionalized Ultra-Thin-Film Aln Contour-Mode Resonators With Self-Sustained Oscillator For Volatile Organic Chemical Detection, Matteo Rinaldi, Brandon Duick, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Chengjie Zuo

This paper reports on the design and experimental verification of a new class of nanoscale gravimetric sensors based on ultra-thin-film AlN Contour-Mode Resonant Sensor (CMR-S) functionalized with ss-DNA and connected to a chip-based self-sustaining oscillator loop (fabricated in the ON Semiconductor 0.5 μm CMOS process) for direct frequency read-out. The 220 MHz oscillator based on the ultra-thin AlN CMR-S exhibits an Allan Variance of ∼20 Hz for 100 ms gate time. The sensor affinity for the adsorption of volatile organic chemicals such as 2,6 dinitroluene (DNT, a simulant for explosive vapors) is enhanced by functionalizing the top gold electrode of …

Theoretical Modeling And Analysis Of Ammonia Gas Sensing Properties Of Vertically Aligned Multiwalled Carbon Nanotube Resistive Sensors And Enhancing Their Sensitivity, Shripriya Darshini Poduri

University of Kentucky Master's Theses

Vertically aligned Multiwalled Carbon Nanotubes (MWCNTs) were grown in the pores of Anodized Aluminum Oxide (AAO) templates and investigated for resistive sensor applications. High Sensitivity of 23% to low concentration (100 ppm) of ammonia was observed. An equivalent circuit model was developed to understand the current flow path in the resistive sensor. This helped us in achieving high sensitivities through amorphous carbon (a-C) layer thickness tailoring by employing post-growth processing techniques like plasma etching.

A simulation model in MATLAB was developed to calculate the device resistance and the change in the sensitivity as a function of device parameters. The steady …

Ss-Dna Functionalized Ultra-Thin-Film Aln Contour-Mode Resonators With Self-Sustained Oscillator For Volatile Organic Chemical Detection, Matteo Rinaldi, Brandon Duick, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of nanoscale gravimetric sensors based on ultra-thin-film AlN Contour-Mode Resonant Sensor (CMR-S) functionalized with ss-DNA and connected to a chip-based self-sustaining oscillator loop (fabricated in the ON Semiconductor 0.5 μm CMOS process) for direct frequency read-out. The 220 MHz oscillator based on the ultra-thin AlN CMR-S exhibits an Allan Variance of ∼20 Hz for 100 ms gate time. The sensor affinity for the adsorption of volatile organic chemicals such as 2,6 dinitroluene (DNT, a simulant for explosive vapors) is enhanced by functionalizing the top gold electrode of …