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Microaccelerometer With Mechanically-Latched Memory, Zhenyu Ma

Theses

A new mechanically-latching micromachined accelerometer is designed in this thesis based on the large deflection of a microcantilever beam. This surface micromachined device moves in the plane of the substrate surface. This device is surface micromachined with no backside etching needed. The interaction of the friction tether and the dimensions of the cantilever beam have been modeled and calculated. The design acceleration sensitivity range is from 100G to 1000G. The photomask set has been designed by using the Mentor Graphics system. The dimension of individual accelerometers ranges from 100 to 1000 micrometers in length to tens of micrometers in width. …