Open Access. Powered by Scholars. Published by Universities.®

Physics Commons

Open Access. Powered by Scholars. Published by Universities.®

Articles 1 - 2 of 2

Full-Text Articles in Physics

Energy Loss Of Ions Implanted In Mos Dielectric Films, Radhey Shyam Aug 2014

Energy Loss Of Ions Implanted In Mos Dielectric Films, Radhey Shyam

All Dissertations

Energy loss measurements of ions in the low kinetic energy regime have been made on as-grown SiO2(170-190nm) targets. Singly charged Na+ ions with kinetic energies of 2-5 keV and highly charged ions Ar+Q (Q=4, 8 and 11) with a kinetic energy of 1 keV were used. Excitations produced by the ion energy loss in the oxides were captured by encapsulating the irradiated oxide under a top metallic contact. The resulting Metal-Oxide-Semiconductor (MOS) devices were probed with Capacitance-Voltage (C V) measurements and extracted the flatband voltages from the C-V curves. The C-V results for singly charged ion experiments reveal …


An Analytic Representation Of The Radial Distribution Of Dose From Energetic Heavy Ions In Water, Si, Lif, Nai, And Sio2, Robert Katz, Kim Sum Loh, Luo Baling, Guo-Rong Huang May 1990

An Analytic Representation Of The Radial Distribution Of Dose From Energetic Heavy Ions In Water, Si, Lif, Nai, And Sio2, Robert Katz, Kim Sum Loh, Luo Baling, Guo-Rong Huang

Robert Katz Publications

An earlier representation of the radial distribution of dose about the path of a heavy ion in liquid water is modified and extended to include silicon, lithium fluoride, sodium iodide, and silicon dioxide.