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Full-Text Articles in Physics
Power And Langmuir Probe Measurements Of H2 Rf Plasma, Alexander A. Stowell
Power And Langmuir Probe Measurements Of H2 Rf Plasma, Alexander A. Stowell
Macalester Journal of Physics and Astronomy
Methane based gases are often used to produce thin films of biomaterials, such as diamond-like carbon, through Plasma Enhanced Chemical Vapor Deposition. The characterization of the H2 plasma will give a deeper understanding of the physical processes occurring. Understanding these processes could lead to the optimization of the production of these thin films in the future. In this paper, we examine the H2 plasma using a Langmuir probe to gain information on the electron temperature and density of the plasma discharge. We measured electron temperatures of 6eV. Our Langmuir probe data indicates the electron temperature remains constant as …
Dissociative Excitation Of H2 In An Rf Plasma, John Carlson
Dissociative Excitation Of H2 In An Rf Plasma, John Carlson
Macalester Journal of Physics and Astronomy
Plasma-enhanced chemical vapor deposition is a widely used method for depositing thin films. In order to optimize the properties of the films, it is important to understand the plasma processes that occur during film growth. In this research we use optical emission spectroscopy in order to measure the spectral emission lines of a plasma produced with hydrogen gas. In conjunction with other measurements and modeling, these measurements can provide insight to the electron energy distribution of the plasma.