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Full-Text Articles in Physics
Spectroscopic End Point Detection With An Electron Beam Evaporator, Ryan Mcgraw
Spectroscopic End Point Detection With An Electron Beam Evaporator, Ryan Mcgraw
University Honors Theses
Spectroscopic end point detection is a common tool used for measuring slope changes in wavelength intensity. Using algorithms able to apply this concept, coatings will be able to be dynamically measured in real time and stopped at the appropriate level to ensure process uniformity. It is currently applied to reductive processes such as etching, where the surface will start to be eaten away, creating a plasma. When the entire amount of a material on a substrate has been eaten away, the plasma will change color as it is beginning to etch a different material. Using a spectrometer, this point where …
Numerical Model Of A Radio Frequency Ion Source For Fusion Plasma Using Particle-In-Cell And Finite Difference Time Domain, Augustin L. Griswold
Numerical Model Of A Radio Frequency Ion Source For Fusion Plasma Using Particle-In-Cell And Finite Difference Time Domain, Augustin L. Griswold
University Honors Theses
Radio frequency (RF) plasma sources are common tool for application and study, and of particular interest for inertial electrostatic (IEC) fusion. Computational analysis is often carried out using particle in cell (PIC) methods or finite difference time domain (FDTD). However, a more holistic analysis is necessary as the particle distribution is highly dependant on the fields created by the plasma source. Herein, an analysis of a particular planar RF electrode with deuterium gas is provided which covers the fields and the particle behaviour using first FDTD then PIC. Further applications are discussed as well as further directions for this study.