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Experiment And Results On Plasma Etching Of Srf Cavities, J. Upadhyay, Do Im, J. Peshl, S. Popovic, L. Vuskovic, A. -M. Valente-Feliciano, L. Phillips

Physics Faculty Publications

The inner surfaces of SRF cavities are currently chemically treated (etched or electro polished) to achieve the state of the art RF performance. We designed an apparatus and developed a method for plasma etching of the inner surface for SRF cavities. The process parameters (pressure, power, gas concentration, diameter and shape of the inner electrode, temperature and positive dc bias at inner electrode) are optimized for cylindrical geometry. The etch rate non-uniformity has been overcome by simultaneous translation of the gas point-of-entry and the inner electrode during the processing. A single cell SRF cavity has been centrifugally barrel polished, chemically …