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Fabrication Of Suspended Microbolometers On Soi Wafers, Isaac Maxfield
Fabrication Of Suspended Microbolometers On Soi Wafers, Isaac Maxfield
Physics Capstone Projects
A bolometer is a device to measure radiation energy by converting photon energy into heat on an isolated absorber. We plan to use carbon-nanotube (CNT) based absorber to enhance the photon absorption. The absorber is a few microns in size and is suspended with micron-sized bridges which also support metal lines for electrical measurements.