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Inorganic Chemistry

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Chemical Vapor Deposition

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Full-Text Articles in Materials Chemistry

Low Temperature Growth Of High Purity, Low Resistivity Copper Films By Atomic Layer Deposition, Thomas J. Knisley Jan 2011

Low Temperature Growth Of High Purity, Low Resistivity Copper Films By Atomic Layer Deposition, Thomas J. Knisley

Thomas J Knisley

No abstract provided.

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Volatility And High Thermal Stability In Mid To Late First Row Transition Metal Diazadienyl Complexes, Thomas J. Knisley Jan 2011

Volatility And High Thermal Stability In Mid To Late First Row Transition Metal Diazadienyl Complexes, Thomas J. Knisley

Thomas J Knisley

No abstract provided.

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