Nanoscience and Nanotechnology Commons^™

Optical Direct-Write Nanolithography Based On Self-Assembled Resist, Meghana Akella

Open Access Theses

Holographic display is being developed for next generation mobile phones. However, manufacturing of miniature gratings for the holographic projectors cost a few thousand dollars today, not making the concept practical for commercial purposes. In this thesis, we discuss the feasibility of self-assembled nanoparticles to manufacture holographic gratings cost-effectively and at the nanoscale. Using our approach, the gratings can be manufactured at the scale of 20nm and the cost per chip is expected to cost a few dollars.^ In this thesis, a hydrophobic SAM was used to modify the surface of silicon. Direct-write UV laser lithography was used for photothermal patterning …