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- Hafnium oxide (3)
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Articles 1 - 26 of 26
Full-Text Articles in Nanoscience and Nanotechnology
Metal Oxide Nanocomposite Nanoliter Reaction Chamber Fabrication And Applications For Harsh Environment Gas Sensing, Michael C. Briggs
Metal Oxide Nanocomposite Nanoliter Reaction Chamber Fabrication And Applications For Harsh Environment Gas Sensing, Michael C. Briggs
Nanoscale Science & Engineering (discontinued with class year 2014)
In order to perform research at the College of Nanoscale Science and Engineering, funding for the desired research is required. Undergraduates get around that by working under a graduate student or professor who is currently funded. For those who seek funding, they receive it by submitting a grant proposal stating the motivation for research, the background, and previous research done to support this new endeavor, as well as future research plans that will be possible with funding. These grant proposals follow certain formats depending on where the principal investigator is seeking funding. As part of the honors requirement for the …
Advancements Towards Single Site Information Storage And Processing Using Hfo2 Resistive Random Access Memory (Reram), Michael Quinlan Hovish
Advancements Towards Single Site Information Storage And Processing Using Hfo2 Resistive Random Access Memory (Reram), Michael Quinlan Hovish
Nanoscale Science & Engineering (discontinued with class year 2014)
Resistive Random Access Memory (ReRAM) has attracted much attention among researchers due to its fast switching speeds, lower switching voltages, and feasible integration into industry compatible CMOS processing. These characteristics make ReRAM a viable candidate for next-generation Non- Volatile Memory. Transition-Metal-Oxides have been proven to be excellent materials for ReRAM applications. This work investigates the effect of various, post-deposition anneals (PDA) on the switching parameters of Ni/Cu/HfO2/TiN Resistive Memory Devices (RMD). Results are presented in the form of a Small Business Innovation Research (SBIR) grant proposal. The use of the SBIR format emphasizes understanding of the experimental design, commercial viability, …
Generation Of Saws In Ghz Range For Nanoscale Particle Removal, Leigh Kent Lydecker Iv
Generation Of Saws In Ghz Range For Nanoscale Particle Removal, Leigh Kent Lydecker Iv
Nanoscale Science & Engineering (discontinued with class year 2014)
In order to do research at CNSE, funding is required. Funding is achieved by submitting a grant proposal stating the background of the problem one hopes to address, a proposed solution, and sufficient information to prove success is achievable. These grant proposals follow a very particular format, which is extremely valuable to be familiar with in the scientific field of study. Therefore, learning to write a grant proposal for some of the work I have done during my undergraduate studies was proved a valuable learning experience. The following grant proposal is based on the work I have done during the …
High Element Gold Nanorod Plasmonic Sensing Array For Harsh Environment Gas Detection Grant Proposal, Brian Janiszweski
High Element Gold Nanorod Plasmonic Sensing Array For Harsh Environment Gas Detection Grant Proposal, Brian Janiszweski
Nanoscale Science & Engineering (discontinued with class year 2014)
In order to acquire funding for scientific endeavors very specific grant proposal documents must be written and submitted. The following is an example of that. This project was very useful because my peers and I will undoubtedly have to write a grant of some type or another in our future careers. This specific proposal is a mock grant requesting money from the National Science Foundation to fund research into a gas sensor that utilizes gold nanostructures as sensing mechanism. The research done behind this project was performed over three semesters in the lab of Dr. Michael Carpenter form the College …
Neoadjuvant Therapy For Ovarian Cancer Using Bioglycogentm Nanoparticles Sbir Grant Proposal, Alexander E. Talamo
Neoadjuvant Therapy For Ovarian Cancer Using Bioglycogentm Nanoparticles Sbir Grant Proposal, Alexander E. Talamo
Nanoscale Science & Engineering (discontinued with class year 2014)
Project Summary Technical Abstract This Small Business Innovation Research Phase I project, presented by Talamo Inc., is to test an ovarian cancer therapeutic delivery system, comprised of a nanoscale biocompatible vesicle that carries a bioactive small interfering RNA molecule (siRNA), in vivio in mice. The siRNA has shown to reduce the expression of an enzyme (Sod2) that is highly expressed in multiple ovarian cancer types. The reduced expression of Sod2 will allow the tumor to become increasingly susceptible to chemotherapy agents, while simultaneously diminishing tumor progression. Research has proved that the nanoscale vesicle is non-toxic and in combination with siRNA …
Control Over Variability In Nonvolatile Hafnium-Oxide Resistive-Switching Memory Based On Modeling Of The Switching Processes, Brian Jerad Butcher
Control Over Variability In Nonvolatile Hafnium-Oxide Resistive-Switching Memory Based On Modeling Of The Switching Processes, Brian Jerad Butcher
Legacy Theses & Dissertations (2009 - 2024)
Resistive random access memory (ReRAM) technology presents an attractive option for embedded non-volatile (NV) memory systems if its variability (cycle-to-cycle and device-to-device) can be controlled. This dissertation has focused on investigations to identify key mechanisms and parameters which dominate ReRAM variability, and the development of subsequent experimental and simulation-based tools to address this variability. The first component of these efforts entailed identification of the modern-day non-volatile memory technological gaps that have driven the operational requirements and challenges for resistive memory as an emerging NV memory.
Novel Resist Systems For Euv Lithography : Ler, Chain-Scission, Nanoparticle And More, Brian Cardineau
Novel Resist Systems For Euv Lithography : Ler, Chain-Scission, Nanoparticle And More, Brian Cardineau
Legacy Theses & Dissertations (2009 - 2024)
Extreme Ultraviolet (EUV) lithography is currently the best option for replacing 193-nm lithography in future IC fabrication. For EUV to be successful, however, there are a number of challenges that must be overcome. Current resist designs struggle to meet the demands of future lithography nodes. We propose the best way to overcome these obstacles is through the design of novel resist systems.
Charged Particle Imaging Methods For Cd Metrology Of Sub 22nm 3d Device Structures, Aron Joel Cepler
Charged Particle Imaging Methods For Cd Metrology Of Sub 22nm 3d Device Structures, Aron Joel Cepler
Legacy Theses & Dissertations (2009 - 2024)
Critical dimension scanning electron microscopes (CD-SEMs) are used to perform highly accurate dimensional metrology on patterned features. In order to ensure optimal feedback for process control, it is necessary that these tools produce highly reproducible measurements. As the smallest device features continue to shrink, and new challenging high aspect ratio (HAR) structures are being introduced, gaps are appearing between process control measurements that are necessary for high volume manufacturing and the capabilities of the CD-SEM. Two possible routes for solving this problem include improvement of the existing CD-SEM technology or the replacement of the CD-SEM.
The Localized Manipulation Of The Extracellular Matrix Within 3d Collagen Cell Cultures Using A Biomems Device, Ashley N. Clark
The Localized Manipulation Of The Extracellular Matrix Within 3d Collagen Cell Cultures Using A Biomems Device, Ashley N. Clark
Legacy Theses & Dissertations (2009 - 2024)
Approximately 90% of all cancer related deaths can be attributed to the occurrence of metastasis. There are multiple changes that occur within the tumor microenvironment that have been correlated with the onset of metastasis. Different cell types, extracellular matrices, blood vessels, and soluble factors are some of the various components that make up the complex, heterogeneous microenvironment that exists within a tumor. The dynamic relationship between tumor cells and their surrounding environment makes it an ideal environment to study triggers of metastasis, such as the modification of the extracellular matrix. Changes in the multiple aspects of extracellular matrix composition have …
Probe Immobilization Strategies And Device Optimization For Novel Transistor-Based Dna Sensors, Nicholas Michael Fahrenkopf
Probe Immobilization Strategies And Device Optimization For Novel Transistor-Based Dna Sensors, Nicholas Michael Fahrenkopf
Legacy Theses & Dissertations (2009 - 2024)
The research presented herein exploits the terminal phosphate group on single stranded DNA molecules for direct immobilization to surfaces utilized in semiconductor device fabrication with the end goal of transistor based DNA sensors. As a demonstration of the feasibility of this immobilization strategy DNA immobilization to a variety of surfaces was evaluated for usefulness in biosensor applications. It was determined that DNA can be directly immobilized to a variety of semiconductor surfaces through the terminal phosphate group. Further, this immobilization allows for the hybridization of the immobilized DNA to complementary target in solution. The immobilization of DNA to hafnium dioxide …
Plasma-Enhanced Atomic Layer Deposition Of Ruthenium-Titanium Nitride Mixed-Phase Layers For Direct-Plate Liner And Copper Diffusion Barrier Applications, Adam James Gildea
Plasma-Enhanced Atomic Layer Deposition Of Ruthenium-Titanium Nitride Mixed-Phase Layers For Direct-Plate Liner And Copper Diffusion Barrier Applications, Adam James Gildea
Legacy Theses & Dissertations (2009 - 2024)
Current interconnect networks in semiconductor processing utilize a sputtered TaN diffusion barrier, Ta liner, and Cu seed to improve the adhesion, microstructure, and electromigration resistance of electrochemically deposited copper that fills interconnect wires and vias. However, as wire/via widths shrink due to device scaling, it becomes increasingly difficult to have the volume of a wire/via be occupied with ECD Cu which increases line resistance and increases the delay in signal propagation in IC chips. A single layer that could serve the purpose of a Cu diffusion barrier and ECD Cu adhesion promoter could allow ECD Cu to occupy a larger …
Impacts Of Ion Irradiation On Hfo2-Based Resistive Random Access Memory Devices, Xiaoli He
Impacts Of Ion Irradiation On Hfo2-Based Resistive Random Access Memory Devices, Xiaoli He
Legacy Theses & Dissertations (2009 - 2024)
The impacts of ion irradiation on so-called vacancy-change mechanism (VCM) and electrochemical-metallization mechanism (ECM) ReRAM devices based on HfO2 are investigated using various ion sources: H+ (1 MeV), He+ (1 MeV), N+ (1MeV), Ne+ (1.6 MeV) and Ar+ (2.75 MeV) over a range of total doses (105 - 1011 rad(Si)) and fluences (1012 - 1015 cm-2). VCM-ReRAM devices show robust resistive switching function after all irradiation experiments. VCM resistive switching parameters including set voltage (Vset), reset voltage (Vreset), on-state resistance (Ron) and off-state resistance (Roff) exhibited, in most cases, modest changes …
Plasmonic-Based High Temperature Chemical Sensing Using Gold Nanoparticles Embedded In Metal Oxide Thin Films, Nicholas Joy
Plasmonic-Based High Temperature Chemical Sensing Using Gold Nanoparticles Embedded In Metal Oxide Thin Films, Nicholas Joy
Legacy Theses & Dissertations (2009 - 2024)
Thin metal oxide films embedded with Au nanoparticles (AuNPs) have been investigated as high temperature localized surface plasmon resonance (LSPR) based sensing materials to monitor H2, CO, and NO2 at a temperature of 500°C. Applications for this technology include turbine engines as well as other combustion environments where it is important to monitor emission gases for both regulatory purposes as well as combustion control. These high temperature applications, which may be oxidizing or reducing in nature, present challenges to sensor reliability and selectivity, and have therefore necessitated the development of novel sensing devices. While there has been …
White-Light And Infrared Emission From Sicxoy-Based Materials, Vasileios Nikas
White-Light And Infrared Emission From Sicxoy-Based Materials, Vasileios Nikas
Legacy Theses & Dissertations (2009 - 2024)
The development of a Si-based light source has attracted a high level of attention due to its potential unique advantages. For one, the monolithic integration of photonics on on-chip level along with the microelectronics devices would enhance the data processing rate. Additionally the cost per transmitted/processed information capacity can be significantly reduced.
Mueller Based Scatterometry And Optical Characterization Of Semiconductor Materials, Gangadhara Raja Muthinti
Mueller Based Scatterometry And Optical Characterization Of Semiconductor Materials, Gangadhara Raja Muthinti
Legacy Theses & Dissertations (2009 - 2024)
Scatterometry is one of the most useful metrology methods for the characterization and control of critical dimensions (CD) and the detailed topography of periodic structures found in microelectronics fabrication processes. Spectroscopic ellipsometry (SE) and normal incidence reflectometry (NI) based scatterometry are the most widely used optical methodologies for metrology of these structures. Evolution of better optical hardware and faster computing capabilities led to the development of Mueller Matrix (MM) based Scatterometry (MMS). Dimensional metrology using full Mueller Matrix (16 element) scatterometry in the wavelength range of 245nm-1000nm was discussed in this work. Unlike SE and NI, MM data provides complete …
Study Of Nickel Silicide Formation By Physical Vapor Deposition Techniques, Shanti Pancharatnam
Study Of Nickel Silicide Formation By Physical Vapor Deposition Techniques, Shanti Pancharatnam
Legacy Theses & Dissertations (2009 - 2024)
Metal silicides are used as contacts to the highly n-doped emitter in photovoltaic devices. Thin films of nickel silicide (NiSi) are of particular interest for Si-based solar cells, as they form at lower temperature and consume less silicon. However, interfacial oxide limits the reduction in sheet resistance. Hence, different diffusion barriers were investigated with regard to optimizing the conductivity and thermal stability.
Nb Doped Tio2 As A Cathode Catalyst Support Material For Polymer Electrolyte Membrane Fuel Cells, Alexander William O'Toole
Nb Doped Tio2 As A Cathode Catalyst Support Material For Polymer Electrolyte Membrane Fuel Cells, Alexander William O'Toole
Legacy Theses & Dissertations (2009 - 2024)
In order to reduce the emissions of greenhouse gases and reduce dependence on the use of fossil fuels, it is necessary to pursue alternative sources of energy. Transportation is a major contributor to the emission of greenhouse gases due to the use of fossil fuels in the internal combustion engine. To reduce emission of these pollutants into the atmosphere, research is needed to produce alternative solutions for vehicle transportation. Low temperature polymer electrolyte membrane fuel cells are energy conversion devices that provide an alternative to the internal combustion engine, however, they still have obstacles to overcome to achieve large scale …
The Effect Of Energy Deposition On Pattern Resolution In Electron Beam Lithography, Ananthan Raghunathan
The Effect Of Energy Deposition On Pattern Resolution In Electron Beam Lithography, Ananthan Raghunathan
Legacy Theses & Dissertations (2009 - 2024)
Electron beam lithography is one of the most important tools for nanofabrication. Electron beam lithography has consistently been able to offer higher resolution, typically better than 10 nm or so, compared to other techniques. In this work the contribution of electron-substrate interaction to pattern resolution is investigated.
Properties Of Peg, Ppg And Their Copolymers Influence On The Gap-Fill Characteristics Of Damascene Interconnects, Kevin Ryan
Legacy Theses & Dissertations (2009 - 2024)
A laboratory scale plating cell was built that provided reproducible bottom-up fill results for the electrochemical deposition of copper in damascene features. Several techniques used in the full wafer plating tool were incorporated into the setup to accurately control the process conditions. These techniques included but were not limited to a voltage controlled `hot-entry' step, a custom coupon holder to allow sample rotation, a secondary thief electrode and an automatic entry system. The results of qualification experiments are presented to demonstrate that precise control was realized along with repeatable partial fill plating results. The qualified setup was then used to …
Ion Beam Modification Of Single Crystal Sapphire For High Temperature Optical Waveguiding, William Spratt
Ion Beam Modification Of Single Crystal Sapphire For High Temperature Optical Waveguiding, William Spratt
Legacy Theses & Dissertations (2009 - 2024)
High temperature environments (>1000°C) provide a significant challenge for fiber optic based sensing due to the poor physical properties of silica fiber at elevated temperature. Not only does silica soften above 1000°C, but the dopants that are responsible for the refractive index change between the core and cladding diffuse, reducing the fibers effectiveness as a waveguide. Single-crystal sapphire fiber has the potential to supplement fiber sensing at high temperature however sapphire fiber is unclad and no cladding methods exist that withstand high temperatures. In addition to higher losses the lack of a cladding also leads to decreased sensitivity due …
Understanding Defect Interactions In Si Ultra-Shallow P-N Junctions Formed By Very Low Energy Boron Implantation, Lakshmanan H. Vanamurthy
Understanding Defect Interactions In Si Ultra-Shallow P-N Junctions Formed By Very Low Energy Boron Implantation, Lakshmanan H. Vanamurthy
Legacy Theses & Dissertations (2009 - 2024)
One of the biggest challenges in the scaling of CMOS devices is the formation of a highly activated, abrupt, defect free Source drain extension (SDE) region. This is especially difficult with p-FET's because of the (1) Boron diffusion co-efficient enhancement from Transient enhanced diffusion (TED) and (2) low solid solubility of
Defining An Optimal Surface Chemistry For Pluripotent Stem Cell Culture In 2d And 3d, Michael Roy Zonca Jr.
Defining An Optimal Surface Chemistry For Pluripotent Stem Cell Culture In 2d And 3d, Michael Roy Zonca Jr.
Legacy Theses & Dissertations (2009 - 2024)
Surface chemistry is critical for growing pluripotent stem cells in an undifferentiated state. There is great potential to engineer the surface chemistry at the nanoscale level to regulate stem cell adhesion. However, the challenge is to identify the optimal surface chemistry of the substrata for ES cell attachment and maintenance. Using a high-throughput polymerization and screening platform, a chemically defined, synthetic polymer grafted coating that supports strong attachment and high expansion capacity of pluripotent stem cells has been discovered using mouse embryonic stem (ES) cells as a model system. This optimal substrate, N-[3-(Dimethylamino)propyl] methacrylamide (DMAPMA) that is grafted on 2D …
Local Area Mask Patterning Of Extreme Ultraviolet Lithography Reticles For Native Defect Analysis, Adam Lyons
Local Area Mask Patterning Of Extreme Ultraviolet Lithography Reticles For Native Defect Analysis, Adam Lyons
Legacy Theses & Dissertations (2009 - 2024)
Understanding the nature and behavior of native defects on EUV reticles, particularly their printability, is of critical importance to the successful implementation of EUV lithography for high volume manufacturing, as will be demonstrated in the upcoming chapters. Previous defect characterization work has focused on the examination of programmed defects, native defects on blank reticles, and unaligned native defects on patterned reticles. Each of these approaches has drawbacks, which will be discussed in detail, and the aim of this research is to address these deficiencies by developing a method to pattern features of interest over native defects, enabling the direct observation …
Electrical And Optical Characterization Of Carbon Nanotube Diodes, Argyrios Malapanis
Electrical And Optical Characterization Of Carbon Nanotube Diodes, Argyrios Malapanis
Legacy Theses & Dissertations (2009 - 2024)
Carbon nanotubes are good candidates for future applications, including nanoelectronic and nanophotonic devices. Their quasi-one dimensional (1D) character offers appealing device properties. These include reduced carrier scattering, carrier mobility up to two orders of magnitude higher than that of materials used in state-of-the-art computer chips today, current densities rivaling those of the best semiconductors, enhanced optical absorption, and band gaps tunable with tube diameter and doping. Recent breakthroughs in research point to the possibility of placing nanotubes precisely on substrates with densities approaching that of transistors on today's computer chips in a way that's integratable with existing Si-based technology. Such …
Microfluidic-Assisted Atomic Force Microscopy For The Mechanical Characterization Of Soft Biological Materials, Aaron Peter Mosier
Microfluidic-Assisted Atomic Force Microscopy For The Mechanical Characterization Of Soft Biological Materials, Aaron Peter Mosier
Legacy Theses & Dissertations (2009 - 2024)
Viable methods for bacterial biofilm remediation require a fundamental understanding of biofilm mechanical properties and their dependence on dynamic environmental conditions. Mechanical test data, quantifying elasticity or adhesion, may be used to perform physical modeling of biofilm behavior, thus enabling the development of novel remediation strategies. To achieve real-time, dynamic measurements of these properties, a novel analysis platform consisting of a microfluidic flowcell device has been designed and fabricated for in situ analysis using atomic force microscopy (AFM) and confocal laser scanning microscopy (CLSM). The flowcell consists of microfluidic channels for biofilm establishment that are then converted into an open …
Ion Beam Nano-Engineering Of Erbium Doped Silicon For Enhanced Light Emission At 1.54 Microns, Sebastian Naczas
Ion Beam Nano-Engineering Of Erbium Doped Silicon For Enhanced Light Emission At 1.54 Microns, Sebastian Naczas
Legacy Theses & Dissertations (2009 - 2024)
Erbium doped silicon is of great interest as a potential light source in Silicon Photonics research due to its light emission at 1.54 μm, which corresponds to the minimal loss of optical transmission in silica fibers for telecommunications. In this thesis a basic mechanism for excitation and de-excitation of Er in Si is reviewed. Based on such fundamental understanding, an innovative approach is proposed and implemented to improve Er luminescence properties through the formation of metal nanoparticles via impurity gettering in Si nanocavities.