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Study Of Nickel Silicide Formation By Physical Vapor Deposition Techniques, Shanti Pancharatnam Jan 2013

Study Of Nickel Silicide Formation By Physical Vapor Deposition Techniques, Shanti Pancharatnam

Legacy Theses & Dissertations (2009 - 2024)

Metal silicides are used as contacts to the highly n-doped emitter in photovoltaic devices. Thin films of nickel silicide (NiSi) are of particular interest for Si-based solar cells, as they form at lower temperature and consume less silicon. However, interfacial oxide limits the reduction in sheet resistance. Hence, different diffusion barriers were investigated with regard to optimizing the conductivity and thermal stability.


Patterning And Characterization Of Carbon Nanotubes Grown In A Microwave Plasma Enhanced Chemical Vapor Deposition Chamber, Mauricio Kossler Mar 2009

Patterning And Characterization Of Carbon Nanotubes Grown In A Microwave Plasma Enhanced Chemical Vapor Deposition Chamber, Mauricio Kossler

Theses and Dissertations

This research studies the growth of carbon nanotubes (CNT) from a nickel catalyst to be used on a field emission device. This thesis can be divided into three sections: the construction of a vacuum chamber for field emission testing, the design and fabrication of a triode structure to enable improved electron emission, and the pretreatment and growth of CNTs. To experimentally test the field emission of CNTs, a vacuum chamber must attain a vacuum of at least 10-5 torr. Our vacuum chamber designed and built achieved a maximum, final pressure of 10-8 torr. A triode structure was designed …