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Analytical And Fea Analysis Of Silicon Micro-Machined Capacitive Pressure Sensor, Eoghan O'Donoghue
Analytical And Fea Analysis Of Silicon Micro-Machined Capacitive Pressure Sensor, Eoghan O'Donoghue
Theses
This thesis is concerned with the electro-mechanical characterisation of MEMS capacitive pressure sensors and the determination of models to describe their behaviour.
The finite element software package ANSYS is validated as a tool for the examination of the electro-mechanical behaviour of capacitive pressure sensors. It is then used to incorporate the effects of applied load, voltage and residual stress into a model of the sensor structure. The capacitive pressure sensor is modelled both in 3D and also in 2D axis-symmetric modes. The error between the 2D and 3D models is quantified.
The behaviour of structures under electrostatic actuation is investigated. …