Acoustics, Dynamics, and Controls Commons^™

Evaluating The Effects Of Granulated Rubber And Glass Fibers In Polymer Concrete As A Structural Material For Wafer Grinding Machines, Kevin Gabriel Kuehn, Philip Randall Streeter

Materials Engineering

Polymer concrete is a composite material used to replace cast iron and steel in wafer grinding machines for vibration damping. During the grinding and lapping processes of manufacturing silicon wafers, excessive vibrations may cause subsurface damage which requires additional polishing and reduces yield. Nine compositions containing various levels of granulated rubber and glass fibers were manufactured. CRM WRF-10 granulated rubber was examined at 0%, 5%, and 10% and Corning Cem-Fil glass fibers were added at 0%, 0.5%, and 1% by weight. Smooth-On EpoxAcast 690 epoxy resin was held constant at 16% for each composition. Crushed granite aggregate from Martin Marietta, …

Model-Based Design Of An Optimal Lqg Regulator For A Piezoelectric Actuated Smart Structure Using A High-Precision Laser Interferometry Measurement System, Grant P. Gallagher

Master's Theses

Smart structure control systems commonly use piezoceramic sensors or accelerometers as vibration measurement devices. These measurement devices often produce noisy and/or low-precision signals, which makes it difficult to measure small-amplitude vibrations. Laser interferometry devices pose as an alternative high-precision position measurement method, capable of nanometer-scale resolution. The aim of this research is to utilize a model-based design approach to develop and implement a real-time Linear Quadratic Gaussian (LQG) regulator for a piezoelectric actuated smart structure using a high-precision laser interferometry measurement system to suppress the excitation of vibratory modes.

The analytical model of the smart structure is derived using the …