Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 5 of 5
Full-Text Articles in Mechanical Engineering
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Theses and Dissertations
The DoD requires a variety of COTS and number of custom microelectronics to provide important functionality to critical military systems. Photolithography and DRIE are two techniques commonly used in the development of deep anisotropic features for the fabrication and modification of microelectronics and MEMS. However, standard photolithography techniques are ineffective for unique substrate geometries and DRIE processes require a chemical passivation step only applicable to Si substrates. This work confirmed the capability of RIE using DWL to perform deep, highly selective, anisotropic etching on elevated, non-circular substrates.
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Theses and Dissertations
MEMS IMUs are readily available in quantity and have extraordinary advantages over conventional IMUs in size, weight, cost, and power consumption. However, the poor performance of MEMS IMUs limits their use in more demanding military applications. It is desired to use multiple distributed MEMS IMUs to simulate the performance of a single, more costly IMU, using the theory behind Gyro-Free IMUs. A Gyro-Free IMU (GF-IMU) uses a configuration of accelerometers only to measure the three accelerations and three angular rotations of a rigid body in 3-D space. Theoretically, almost any configuration of six distributed accelerometers yields sufficient measurements to solve …
The Effects Of Ionizing Radiation On Microelectromechanical Systems (Mems) Actuators: Electrostatic, Electrothermal, And Residual Stress, Jared R. Caffey
The Effects Of Ionizing Radiation On Microelectromechanical Systems (Mems) Actuators: Electrostatic, Electrothermal, And Residual Stress, Jared R. Caffey
Theses and Dissertations
The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.
Control And Characterization Of Line-Addressable Micromirror Arrays, Harris J. Hall
Control And Characterization Of Line-Addressable Micromirror Arrays, Harris J. Hall
Theses and Dissertations
This research involved the design and implementation of a complete line-addressable control system for a 32x32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N2 to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bi-stability of individual elements to bold arbitrary bi-stable phase patterns. The control system applies pulse width modulated (PWM) signals to the rows and columns of the micromirror array. Three modes of operation were conceived and built into the system. The first was the traditional signal scheme which requires …
Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading
Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading
Theses and Dissertations
In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …