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Articles 1 - 18 of 18
Full-Text Articles in Mechanical Engineering
Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh
Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh
Theses and Dissertations
Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …
Robust Scandium Aluminum Nitride Mems Resonators For L Band Operation In Orbital Environments, Israel W. Dunk
Robust Scandium Aluminum Nitride Mems Resonators For L Band Operation In Orbital Environments, Israel W. Dunk
Theses and Dissertations
This thesis investigates AlN alloyed with scandium in a variety of resonator architectures including WEM, overtone WEM, LEM, and SAW that have the potential to achieve high levels of electrical performance and environmental robustness. SAW resonators operating near 370 MHz are fabricated on polycrystalline Sc.37Al.63N, and AlN with the resulting devices compared and conclusions drawn as to the merits of each material. The design and fabrication of SAW devices is discussed in detail, with the operating characteristics of these resonators then tested both electrically and mechanically. Mechanical characterisation includes analysis of vibration and shock effects on …
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Theses and Dissertations
The DoD requires a variety of COTS and number of custom microelectronics to provide important functionality to critical military systems. Photolithography and DRIE are two techniques commonly used in the development of deep anisotropic features for the fabrication and modification of microelectronics and MEMS. However, standard photolithography techniques are ineffective for unique substrate geometries and DRIE processes require a chemical passivation step only applicable to Si substrates. This work confirmed the capability of RIE using DWL to perform deep, highly selective, anisotropic etching on elevated, non-circular substrates.
Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard
Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard
Theses and Dissertations
AFRL/MLPJE had developed a novel thermal sensing material termed protein-impregnated-polymer (PIP). Thus far, a proof-of-concept has been demonstrated using a macro-sized pixel (0.64 mm2) as a bolometric detector. In an effort to better characterize this novel thermal sensing material, experimental data was used to determine figures of merit (FOMs) comparative to off-the-shelf thermal detectors. Microelectromechanical (MEMS) pixels were designed and used as the support structure for an inkjet-deposited droplet of the PIP. During the material characterization, two observations were made: PIP is a pyroelectric material, and the polymer (polyvinyl alcohol (PVA)) without the protein was found to be …
Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda
Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda
Theses and Dissertations
The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property, the PIP is a potential material for use as an uncooled bolometer, or thermal sensor. In this research, a thermally-isolated pixel design, sensor characterization methods, and sensor fabrication and processing steps were developed. To create a microbolometer, the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to …
Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko
Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko
Theses and Dissertations
While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, high isolation, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This model was verified by applying constant biases to metal-silicon nitride-silicon capacitors and tracking …
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Theses and Dissertations
MEMS IMUs are readily available in quantity and have extraordinary advantages over conventional IMUs in size, weight, cost, and power consumption. However, the poor performance of MEMS IMUs limits their use in more demanding military applications. It is desired to use multiple distributed MEMS IMUs to simulate the performance of a single, more costly IMU, using the theory behind Gyro-Free IMUs. A Gyro-Free IMU (GF-IMU) uses a configuration of accelerometers only to measure the three accelerations and three angular rotations of a rigid body in 3-D space. Theoretically, almost any configuration of six distributed accelerometers yields sufficient measurements to solve …
Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion
Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion
Theses and Dissertations
Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …
A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu
A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu
Theses and Dissertations
Micro-Electro-Mechanical Systems (MEMS) technology holds great promise for future navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices. Current MEMS devices are much less accurate than standard inertial sensors, but they can still be useful. In this thesis, data was recorded from an inexpensive MEMS inertial measurement unit and integrated with GPS measurements using a tightly-coupled Kalman filter. The overall goal of this research is to investigate the usefulness of MEMS sensors for a small, real-time, low-cost INS/GPS integration. A golf cart was used to collect dynamic data, along with a commercial …
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Theses and Dissertations
RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …
Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo
Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo
Theses and Dissertations
There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …
Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh
Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh
Theses and Dissertations
Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission …
Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley
Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley
Theses and Dissertations
This thesis studies selective etching techniques for the development of AlxGa1-xAs micro-opto-electro-mechanical systems (MOEMS). New MEMS technology based on materials such as AlxGa1-xAs enables the development of micro-systems with embedded active micro-optical devices. Tunable micro-lasers and optical switching based on MOEMS technology will improve future wavelength division multiplexing (WDM) systems. WDM vastly increases the speed of military communications and sensor data processing. From my designs, structures are prepared by molecular beam epitaxy. I design a mask set for studies of crystal plane selectivity. I perform a series of experiments on the selective …
Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey
Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey
Theses and Dissertations
Tunable micro-optical devices are expected to be vital for future military optical communication systems. In this research I seek to optimize the design of a microelectromechanical (MEM) structure integrated with a III-V semiconductor micro-optical device. The resonant frequency of an integrated optical device, consisting of a Fabry-Perot etalon or vertical cavity surface emitting laser (VCSEL), may be tuned by applying an actuation voltage to the MEM Flexure, thereby altering the device's optical cavity length. From my analysis I demonstrate tunable devices compatible with conventional silicon 5V integrated circuit technology. My design for a Fabry-Perot etalon has a theoretical tuning range …
Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.
Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.
Theses and Dissertations
Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle …
Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading
Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading
Theses and Dissertations
In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Theses and Dissertations
Chemical microsensors are a new field integrating chemical thin film technology with solid-state fabrication techniques to make devices capable of detecting chemicals in the environment. This thesis evaluated commercially available fabrication processes and numerous sensor designs for working chemical sensors. The commercial processes used were MUMPS for surface micromachined devices and MOSIS for bulk micromachined devices. Overall, eight fabrication runs and 29 different designs were made. Of these designs, two were shown to work effectively. Other designs failed due to fabrication problems and design errors that caused release problems. One design that worked was a surface micromachined chemoresistor with interdigitated …
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Theses and Dissertations
Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …