Mechanical Engineering Commons^™

Effects Of Annealing Treatment On Optical Properties Of Anatase Tio 2 Thin Films

A.S. Md Abdul Haseeb

In this investigation, anatase TiO 2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with …