Mechanical Engineering Commons^™

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) Super High Frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …

Absolute Nitrogen Atom Density Measurements By Two-Photon Laser-Induced Fluorescence Spectroscopy In Atmospheric Pressure Dielectric Barrier Discharges Of Pure Nitrogen, Et-Touhami Es-Sebbar, Christian Sarra-Bournet, Nicolas Naudé, Françoise Massines, Nicolas Gherardi

Dr. Et-touhami Es-sebbar

In this paper, two-photon absorption laser induced fluorescence spectroscopy is used to follow the nitrogen atom density in flowing dielectric barrier discharges fed with pure nitrogen and operating at atmospheric pressure. Two different dielectric barrier discharge regimes are investigated: the Townsend regime, which is homogeneous although operating at atmospheric pressure, and the more common filamentary regime. In both regimes, densities as high as 3x1014 /cm3 are detected. However, the N atoms kinetic formation depends on the discharge regime. The saturation level is reached more rapidly with a filamentary discharge. For a given discharge regime, the N atom density depends strongly …

Contributions To The Development Of The S.E.T.U.P. (Experimental And Theoretical Simulations Useful For Planetology) Project, E. Arzoumanian, C. Romanzin, M-C. Gazeau, Et. Es-Sebbar, A. Jolly, S. Perrier, Y. Benilan

Dr. Et-touhami Es-sebbar

No abstract provided.

Multiwavelength Studies For Titan's Atmospheric Composition Analysis, Y. Benilan, Et. Es-Sebbar, N. Fray, M-C. Gazeau, A. Jolly, M. Schwell, J. Guillemin

Dr. Et-touhami Es-sebbar

Titan's atmosphere mainly made of nitrogen and methane is rich in organic molecules. Hydrocarbons are formed from the photolytic dissociation of CH4 and nitriles are created by dissociation of N2 followed by reactions with hydrocarbons. In order to understand the physicochemical mechanisms responsible for the evolution of Titan's atmosphere, photochemical models are built. The latter need constrains for vertical profiles of organic compounds from the high thermosphere down to the low stratosphere as well as photodissociation rates. Those profiles over the entire atmosphere can be retrieved from Cassini observations, in particular by limb sounding, coupling infrared and ultraviolet spectroscopy. However, …

Vuv Photostability Of Prebiotic Species, M. Schwell, Y. Bénilan, M.-C. Gazeau, N. Fray, A. Jolly, Et. Es-Sebbar, N. Champion, S. Leach, H. W Jochims, H. Baumgärtel, E. Rühl

Dr. Et-touhami Es-sebbar

No abstract provided.

S.E.T.U.P. Experimental And Theoretical Simulations Useful For Planetology- Related Studies In The Frame Of A Program Of Titan’S Atmosphere Laboratory Simulations, M.-C. Gazeau, Et. Es-Sebbar, E. Arzoumanian, C. Romanzin, A. Jolly, S. Perrier, Y. Bénilan

Dr. Et-touhami Es-sebbar

No abstract provided.

Utilization Of Virtual Globes For Open Source Industrial Symbiosis, William Doyle, Joshua M. Pearce

Joshua M. Pearce

Piezoelectric Aluminum Nitride Nanoelectromechanical Actuators, Nipun Sinha, Graham Wabiszewski, Rashed Mahameed, Valery Felmetsger, Shawn Tanner, Robert Carpick, Gianluca Piazza

Nipun Sinha

This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric layers for the fabrication of vertically deflecting nanoactuators. The films exhibit an average piezoelectric coefficient (d31~−1.9 pC/N), which is comparable to its microscale counterpart. This allows vertical deflections as large as 40 nm from 18 µm long and 350 nm thick multilayer cantilever bimorph beams with 2 V actuation. Furthermore, in-plane stress and stress gradients have been simultaneously controlled. The films exhibit leakage currents lower than 2 nA/cm2 at 1 V, and have an average relative dielectric constant of approximately 9.2 (as in thicker films). These material …

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) Super High Frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …

Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza

Matteo Rinaldi

In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The …

Characterization Of An N2 Flowing Microwave Post-Discharge By Oes Spectroscopy And Determination Of Absolute Ground-State Nitrogen Atom Densities By Talif, Et. Es-Sebbar, Y. Benilan, A. Jolly, M-C. Gazeau

Dr. Et-touhami Es-sebbar

A flowing microwave post-discharge source sustained at 2.45 GHz in pure nitrogen has been investigated by optical emission spectroscopy (OES) and two-photon absorption laser-induced fluorescence (TALIF) spectroscopy. Variations of the optical emission along the post-discharge (near, pink and late afterglow) have been studied and the gas temperature has been determined. TALIF spectroscopy has been used in the late afterglow to determine the absolute ground-state nitrogen atomic densities using krypton as a reference gas. Measurements show that the microwave flowing post-discharge is an efficient source of N (4S) atoms in late afterglow. In our experimental conditions, the maximum N (4S) density …

Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza

Matteo Rinaldi

A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …

5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical …

Interatomic Potentials For Hydrogen In A-Iron Based On Density Functional Theory, Ashwin Ramasubramaniam, Emily A. Carter, Mitsuhiro Itakura

Ashwin Ramasubramaniam

Aln Contour-Mode Resonators For Narrow-Band Filters Above 3 Ghz, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of thin-film (250 nm) Super High Frequency (SHF) laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions in order to excite a contour-extensional mode of vibration in nano features of an ultra-thin (250 nm) Aluminum Nitride (AlN) film. In this first demonstration two-port resonators vibrating up to 4.5 GHz were fabricated on the same die and attained electromechanical coupling, kt2, in excess of …

Us Patent 7,501,922: Permanent Magnetic Male And Female Levitation Supports, Sanza Kazadi

Sanza Kazadi

Integration Of Aln Micromechanical Contour-Mode Technology Filters With Three-Finger Dual Beam Aln Mems Switches, Nipun Sinha, Rashed Mahameed, Chengjie Zuo, Gianluca Piazza

Nipun Sinha

In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN …

Substrate-Induced Magnetism In Epitaxial Graphene, Ashwin Ramasubramaniam, V. B. Shenoy, N. V. Medhekar

Ashwin Ramasubramaniam

Body-Biased Complementary Logic Implemented Using Aln Piezoelectric Mems Switches, Nipun Sinha, Timothy S. Jones, Zhijun Guo, Gianluca Piazza

Nipun Sinha

This paper reports on the first implementation of low voltage complementary logic (< 1.5 V) by using body-biased aluminum nitride (AlN) piezoelectric MEMS switches. For the first time, by using opposite body biases the same mechanical switch has been made to operate as both an n-type and p-type (complementary) device. Body-biasing also gives the ability to precisely tune the threshold voltage of a switch. The AlN MEMS switches have shown extremely small subthreshold slopes and threshold voltages as low as 0.8 mV/dec and 30 mV, respectively. Furthermore, this work presents a fully mechanical body-biased inverter formed by two AlN MEMS switches operating at 100 Hz with a ± 1.5 V voltage swing.

Ultra Thin Aln Piezoelectric Nano-Actuators, Nipun Sinha, Graham E. Wabiszewski, Rashed Mahameed, Valery V. Felmetsger, Shawn M. Tanner, Robert W. Carpick, Gianluca Piazza

Nipun Sinha

This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelectric layers for the fabrication of vertically deflecting nano-actuators. An average piezoelectric coefficient (d31~ 1.9 pC/N) that is comparable to its microscale counterpart has been demonstrated in nanoscale thin AlN films. Vertical deflections as large as 40 nm have been obtained in 18 μm long and 350 nm thick cantilever beams under bimorph actuation with 2 V. Furthermore, in-plane stress and stress gradients have been simultaneously controlled. Leakage current lower than 2 nA/cm2 at 1 V has been recorded and an average relative dielectric constant of …

Effects Of Annealing Treatment On Optical Properties Of Anatase Tio 2 Thin Films

A.S. Md Abdul Haseeb

In this investigation, anatase TiO 2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with …

The Development Of Humans – A Study Including Languages, Cultures, Religions And Genetics, Dr. Erik Dahlquist, Dr. Allan Dahlquist

Dr. Erik Dahlquist

The book covers the development of culture, religion, language and genetics of the human population since prehistory. Four main cultures have spread around the globe: 1) Monosyllabic language people with ancestor cult 2) Austroasiatic people with sun worshipping and megalit graves. Counting with 20 as the base 3) Uralic speaking people with kings from the sky, and strong city states. Moon and mother godess. Don´t differentiate between male and female, he and she. 4) Inflectual language speaking people with sky gods and cattles. Indoeuropeans. Often endings differentiating he and she. Shows how original cultures are refelected in todays society.

Development Of A Model Predictive Controller For Tankless Water Heaters, Gregor P. Henze, David P. Yuill, Andrew H. Coward

David Yuill

This paper describes the development of a novel approach to temperature control of tankless water heaters (TWHs). Conventional methods of controlling TWHs typically allow a high degree of error in the outlet water temperature when subjected to disturbances in flow rate or inlet water temperature. Poor control affects comfort, safety, and energy consumption associ- ated with TWHs. The novel control approach presented here uses model predictive control (MPC) to minimize the outlet temperature error. A dynamic heat transfer model of an electric TWH is developed and validated and used within a MPC-based controller. The controller is interfaced to a physical …