Mechanical Engineering Commons^™

Infrared Metasurfaces Created With Off-Normal Incidence Microsphere Photolithography, Chuang Qu, Edward C. Kinzel

Mechanical and Aerospace Engineering Faculty Research & Creative Works

Fabricating metasurfaces over large areas at low costs remains a critical challenge to their practical implementation. This paper reports on the use of microsphere photolithography (MPL) to create infrared metasurfaces by changing the angle-of-incidence of the illumination to steer the photonic jet. The displacement of the photonic jet is shown to scale with the diameter of the microsphere while the exposure dose scales with the square of the microsphere diameter. This process is robust in the presence of local defects in the microsphere lattice. The paper demonstrates patterning split ring resonators and tripole based metasurfaces using MPL, which are fabricated …