Mechanical Engineering Commons^™

Performance-On-Demand Mems (Podmems): Electrical Control Of Effective Mass, Damping, And Stiffness, Shehrin Sayed

Open Access Theses

We propose the use of electrostatic force feedback to control the stiffness, damping, or mass of MEMS. If feedback forces are proportional to sensed displacement, velocity, or acceleration of a MEMS proof mass, then feedback can be used to increase or decrease the apparent stiffness, damping, and or mass of the MEMS. Such feedback can be used to compensate for process variations, packaging stress, thermal drift, viscous damping, etc. Prior efforts by others include position or velocity based feedback for modifying frequency, bandwidth, quality factor, or sensitivity of resonators. We present a means of quantitative control of stiffness, damping, and …