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Articles 1 - 30 of 40
Full-Text Articles in Mechanical Engineering
Schaeffler Icvd Coating Machine, Louis Mcgrath
Schaeffler Icvd Coating Machine, Louis Mcgrath
Williams Honors College, Honors Research Projects
Chemical Vapor Deposition (CVD) is mutual technology used to deposit thin film through a gaseous phase by vaporizing the solid materials. This conventional process usually requires high thermal stability of the materials, which is not applicable for most of the polymeric materials. Therefore, a novel process, initiated Chemical Vapor Deposition (iCVD) is developed by introducing the gaseous monument and initiator to form the thin film in-situ. By adjusting the free-radical polymerization in the vapor phase, a variety of thin and uniform polymer films can be achieved. Depending on the chemistry, iCVD has many categories. This report explains the design …
Molecular Dynamics Study Of Characterization In Metal-Free Friction Materials, Yizhan Zhang
Molecular Dynamics Study Of Characterization In Metal-Free Friction Materials, Yizhan Zhang
Electronic Theses and Dissertations
Metallic friction materials currently used in industry may adversely impact the environment. Substitutions for metals in friction materials, on the other hand, can introduce operational safety issues and other unforeseeable issues such as thermal-mechanical instabilities and insufficient strength. In view of it, this dissertation focuses on developing different kinds of materials from simple structure to complex structure and evaluating the material properties with the assistance of molecular dynamics (MD) tools at the nano scale.
First, the concept of the contacted surfaces in friction at the atomic scale was introduced in order to get accurate understanding of the friction process compared …
Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Faculty Publications
Microelectromechanical systems (MEMS) resonators use is widespread, from electronic filters and oscillators to physical sensors such as accelerometers and gyroscopes. These devices' ubiquity, small size, and low power consumption make them ideal for use in systems such as CubeSats, micro aerial vehicles, autonomous underwater vehicles, and micro-robots operating in radiation environments. Radiation's interaction with materials manifests as atomic displacement and ionization, resulting in mechanical and electronic property changes, photocurrents, and charge buildup. This study examines silicon (Si) ion irradiation's interaction with piezoelectrically transduced MEMS resonators. Furthermore, the effect of adding a dielectric silicon oxide (SiO2) thin film is …
Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang
Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang
Electronic Theses and Dissertations
Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …
Thermal Transport Across 2d/3d Van Der Waals Interfaces, Cameron Foss
Thermal Transport Across 2d/3d Van Der Waals Interfaces, Cameron Foss
Doctoral Dissertations
Designing improved field-effect-transistors (FETs) that are mass-producible and meet the fabrication standards set by legacy silicon CMOS manufacturing is required for pushing the microelectronics industry into further enhanced technological generations. Historically, the downscaling of feature sizes in FETs has enabled improved performance, reduced power consumption, and increased packing density in microelectronics for several decades. However, many are claiming Moore's law no longer applies as the era of silicon CMOS scaling potentially nears its end with designs approaching fundamental atomic-scale limits -- that is, the few- to sub-nanometer range. Ultrathin two-dimensional (2D) materials present a new paradigm of materials science and …
Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles
Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles
Mechanical Engineering ETDs
Lead zirconate titanate (PZT) has been a material of interest for sensor, actuator, and transducer applications in microelectromechanical systems (MEMS). This is due to their favorable piezoelectric, pyroelectric and ferroelectric properties. While various methods are available to deposit PZT thin films, radio frequency (RF) magnetron sputtering was selected to provide high quality PZT films with the added capability of batch processing. These sputter deposited PZT films were characterized to determine their internal film stress, Young’s modulus, composition, and structure. After characterization, the sputtered PZT samples were poled using corona poling and direct poling methods. As a means of comparison, commercially …
Thermometry Via Diffusion In Ferrous Core-Shell Nanoparticles For Induction Heating Applications, Hayden Carlton
Thermometry Via Diffusion In Ferrous Core-Shell Nanoparticles For Induction Heating Applications, Hayden Carlton
Graduate Theses and Dissertations
Induction heating causes the release of enormous amounts of heat from dispersed magnetic nanoparticles. While the rate of heat transfer can be easily quantified calorimetrically, measuring the temperature of the nanoparticles on the nanoscale presents experimental challenges. Fully characterizing the temperature and thermal output of these magnetic particles is necessary to gauge overall heating efficiency and to provide a more holistic understanding of heat transfer on the nanoscale. Herein, this dissertation seeks to develop a novel nanoparticle thermometry technique, which correlates diffusion behavior in core-shell nanoparticles to local temperature. Initial measurements suggested that heating silica capped ferrous nanoparticles (SCNPs) via …
Additive Manufacturing Using Robotic Manipulators, Fdm, And Aerosol Jet Printers., Alexander Curry
Additive Manufacturing Using Robotic Manipulators, Fdm, And Aerosol Jet Printers., Alexander Curry
Electronic Theses and Dissertations
Additive manufacturing has created countless new opportunities for fabrication of devices in the past few years. Advances in additive manufacturing continue to change the way that many devices are fabricated by simplifying processes and often lowering cost. Fused deposition modeling (FDM) is the most common form of 3D printing. It is a well-developed process that can print various plastic materials into three-dimensional structures. This technology is used in a lot of industries for rapid prototyping and sometimes small batch manufacturing. It is very inexpensive, and a prototype can be created in a few hours, rather than days. This is useful …
Development Of Light Actuated Chemical Delivery Platform On A 2-D Array Of Micropore Structure, Hojjat Rostami Azmand, Hojjat Rostami Azmand
Development Of Light Actuated Chemical Delivery Platform On A 2-D Array Of Micropore Structure, Hojjat Rostami Azmand, Hojjat Rostami Azmand
Dissertations and Theses
Localized chemical delivery plays an essential role in the fundamental information transfers within biological systems. Thus, the ability to mimic the natural chemical signal modulation would provide significant contributions to understand the functional signaling pathway of biological cells and develop new prosthetic devices for neurological disorders. In this paper, we demonstrate a light-controlled hydrogel platform that can be used for localized chemical delivery in a high spatial resolution. By utilizing the photothermal behavior of graphene-hydrogel composites confined within micron-sized fluidic channels, patterned light illumination creates the parallel and independent actuation of chemical release in a group of fluidic ports. The …
Development And Test Of High Temperature Surface Acoustic Wave Gas Sensors, Armando E. Ayes Moncada
Development And Test Of High Temperature Surface Acoustic Wave Gas Sensors, Armando E. Ayes Moncada
Electronic Theses and Dissertations
The demand for sensors in hostile environments, such as power plant environments, exhaust systems and high-temperature metallurgy environments, has risen over the past decades in a continuous attempt to increase process control, improve energy and process efficiency in production, reduce operational and maintenance costs, increase safety, and perform condition-based maintenance in equipment and structures operating in high-temperature, harsh-environment conditions. The increased reliability, improved performance, and development of new sensors and networks with a multitude of components, especially wireless networks, are the target for operation in harsh environments. Gas sensors, in particular hydrogen gas sensors, operating above 200°C are required in …
Pool Boiling Inversion On Femtosecond Laser Surface Processed 304 Stainless Steel And Its Impact On Steady-State Time Constants, Justin Costa-Greger, Alfred Tsubaki, Josh Gerdes, Mark Anderson, Craig Zuhlke, Dennis Alexander, Jeff Shield, George Gogos
Pool Boiling Inversion On Femtosecond Laser Surface Processed 304 Stainless Steel And Its Impact On Steady-State Time Constants, Justin Costa-Greger, Alfred Tsubaki, Josh Gerdes, Mark Anderson, Craig Zuhlke, Dennis Alexander, Jeff Shield, George Gogos
UCARE Research Products
FLSP surfaces resulting in boiling inversion require longer times to reach steady-state once inversion has occurred Boiling inversion has been shown to be the result of changing nucleation dynamics in which a large number of nucleation sites activate Increased time required to reach steady-state is linked to the rate at which these nucleation sites activate. Heat fluxes above the boiling inversion point can require up to an additional 3 hours to reach steady-state, compared to the typical 15-20 minutes reported in the literature
Design Of An Affordable Rotating Drum Electrospinner For Classroom Education, Peder Solberg
Design Of An Affordable Rotating Drum Electrospinner For Classroom Education, Peder Solberg
The Journal of Undergraduate Research
Electrospinning is a technology used to generate small fibers down to nano-scale size. This method of fiber creation has been around for many years. However, in recent years electrospinning has found increased applications, especially in the area of tissue engineering due to its ability to create fibers with properties similar to the extracellular matrix in tissue. An electrospinning platform can illustrate concepts of engineering, electro-mechanical system design, manufacturing, and biomedical applications in one single package. Hence, it provides an excellent opportunity to integrate into secondary (middle and high school) and post-secondary (undergraduate) technology education.
Furthermore, just as integration of 3D …
Exploring Convergence Of Snake Skin-Inspired Texture Designs And Additive Manufacturing For Mechanical Traction, Catherine Sue Tiner
Exploring Convergence Of Snake Skin-Inspired Texture Designs And Additive Manufacturing For Mechanical Traction, Catherine Sue Tiner
Graduate Theses and Dissertations
This research focuses on the understanding, development, and additive manufacture of a 3D printed snake skin-inspired texture pattern. The design functionalities of snake skin were determined through the study of the snake species Python Regius otherwise known as the ball python. Each scale of a snake has hierarchical texture with hexagonal macro-patterns aligned on the ventral surface of the skin with overriding anisotropic micro textured patterns such as denticulations and fibrils. Using a laser-powder bed fusion (L-PBF) process, 420 stainless steel samples were 3D printed which closely resemble the above described directional texture of natural snake skin. This printed surface …
Investigation Of The Electrode Polarization Effect For Biosensor Applications, Anil Koklu
Investigation Of The Electrode Polarization Effect For Biosensor Applications, Anil Koklu
Mechanical Engineering Research Theses and Dissertations
My research focuses on electrokinetic transport. Particularly, in this dissertation, we focus on fabrication and testing of micro electrodes with nanostructured surfaces to minimize the electrode polarization (EP) effects for biosensor applications. In the first study, electrochemical deposition of gold nanoparticles on to planar gold electrodes was used to generate rough surfaces. Dendritic nanostructures that reduced EP up to two orders of magnitude was obtained by optimizing the deposition conditions. These structures also enhanced dielectrophoresis (DEP) response of our bio-chips, making them usable in physiological buffers. In further studies we discovered a universal scaling of EP in the frequency domain, …
Silica-Coated Metallic Nanoparticle-Based Hierarchical Super-Hydrophobic Surfaces Fabricated By Spin-Coating And Inverse Nanotransfer Printing, Shengjie Zhai, Hui Zhao
Silica-Coated Metallic Nanoparticle-Based Hierarchical Super-Hydrophobic Surfaces Fabricated By Spin-Coating And Inverse Nanotransfer Printing, Shengjie Zhai, Hui Zhao
Mechanical Engineering Faculty Research
By combining spin coating and inverse nanotransfer printing, silica-coated gold nanoparticles are patterned onto polydimethylsiloxane (PDMS) superhydrophobic surfaces to form a hierarchical structure. A layer of nanoparticles is spin-coated on a flat silicon substrate serving as the stamp, which is then transferred to the raised regions of PDMS surfaces. Our inverse nanotransfer printing is in contrast to the standard nanotransfer printing, which transfers metal from the raised regions of a stamp to a flat PDMS surface. The fabricated hierarchical surface exhibits a higher contact angle and delays the Cassie-Wenzel transition during evaporation of a sessile droplet, indicating an improvement of …
Structural Health Monitoring Of Composite Parts: A Review, Jacob Pessin
Structural Health Monitoring Of Composite Parts: A Review, Jacob Pessin
Honors Theses
Structural health monitoring has the potential to allow composite structures to be more reliable and safer, then by using more traditional damage assessment techniques. Structural health monitoring (SHM) utilizes individual sensor units that are placed throughout the load bearing sections of a structure and gather data that is used for stress analysis and damage detection. Statistical time based algorithms are used to analyze collected data and determine both damage size and probable location from within the structure. While traditional calculations and life span analysis can be done for structures made of isotropic materials such as steel or other metals, composites …
Hyperspectral Imaging For Characterizing Single Plasmonic Nanostructure And Single-Cell Analysis, Nishir Sanatkumar Mehta
Hyperspectral Imaging For Characterizing Single Plasmonic Nanostructure And Single-Cell Analysis, Nishir Sanatkumar Mehta
LSU Master's Theses
Orientation of plasmonic nanostructures is an important feature in many nanoscale applications such as photovoltaics, catalyst, biosensors DNA interactions, protein detections, hotspot of surface-enhanced Raman spectroscopy (SERS), and fluorescence resonant energy transfer (FRET) experiments. Silver nanocubes with significant spectral signatures between 400-700 nm are observed in this experimental research. Whereas study of single cells will enable the analysis of cell-to-cell variations within a heterogeneous population. These variations are important for further analysis and understanding of disease propagation, drug development, stem cell differentiation, embryos development, and how cells respond to each other and their environment. Adipose-derived mesenchymal stem cells possess the …
Mechanical And Electrical Characterization Of Carbon Fiber/Bucky Paper/Zinc Oxide Hybrid Composites, Suma Ayyagari, Marwan Al-Haik, Virginie Rollin
Mechanical And Electrical Characterization Of Carbon Fiber/Bucky Paper/Zinc Oxide Hybrid Composites, Suma Ayyagari, Marwan Al-Haik, Virginie Rollin
Publications
The quest for multifunctional carbon fiber reinforced composites (CFRPs) expedited the use of several nano reinforcements such as zinc oxide nanorods (ZnO) and carbon nanotubes (CNTs). Zinc oxide is a semi-conductor with good piezoelectric and pyroelectric properties. These properties could be transmitted to CFRPs when a nanophase of ZnO is embedded within CFRPs. In lieu of ZnO nanorods, Bucky paper comprising mat of CNTs could be sandwiched in-between composite laminae to construct a functionally graded composite with enhanced electrical conductivities. In this study, different configurations of hybrid composites based on carbon fibers with different combinations of ZnO nanorods and Bucky …
Investigating The Classical And Non-Classical Mechanical Properties Of Gan Nanowires, Mohammad Reza Zamani Kouhpanji
Investigating The Classical And Non-Classical Mechanical Properties Of Gan Nanowires, Mohammad Reza Zamani Kouhpanji
Electrical and Computer Engineering ETDs
Study and prediction of classical and non-classical mechanical properties of GaN is crucial due to the potential application of GaN nanowires (NWs) in piezoelectric, probe-based nanometrology, and nanolithography areas. GaN is mainly grown on sapphire substrates whose lattice constant and thermal expansion coefficient are significantly different from GaN. These discrepancies cause mechanical defects and high residual stresses and strains in GaN, which reduce its quantum efficiency.
Specifically, for nanoscale applications, the mechanical properties of materials differ significantly compared to the bulk properties due to size-effects. Therefore, it is essential to investigate the mechanical properties of GaN NWs using the non-classical …
Optimization Of Reduced Graphene Oxide Deposition For Hydrogen Sensing Technologies, Matthew Pocta
Optimization Of Reduced Graphene Oxide Deposition For Hydrogen Sensing Technologies, Matthew Pocta
Mechanical Engineering Undergraduate Honors Theses
Graphene is known to be a key material for improving the performance of hydrogen sensors. High electrical conductivity, maximum possible surface area with respect to volume, and high carrier mobility are a few of the properties that make graphene ideal for hydrogen sensing applications. The problem with utilizing graphene is the difficulty in depositing uniform, thin layers onto substrate surfaces. This study examines a new method of optimizing graphene deposition by utilizing an airbrush to deposit both graphene oxide (GO) and reduced graphene oxide (rGO) onto glass substrates. The number of depositions were varied among samples to study the effect …
Mechanical Reliability Of Implantable Polyimide-Based Magnetic Microactuators For Biofouling Removal, Christian G. Figueroa-Espada, Qi Yang, Hyowon Lee
Mechanical Reliability Of Implantable Polyimide-Based Magnetic Microactuators For Biofouling Removal, Christian G. Figueroa-Espada, Qi Yang, Hyowon Lee
The Summer Undergraduate Research Fellowship (SURF) Symposium
Hydrocephalus is a neurological disorder that typically requires a long-term implantation of a shunt system to manage its symptoms. These shunt systems are notorious for their extremely high failure rate. More than 40% of all implanted shunt systems fail within the first year of implantation. On average, 85% of all hydrocephalus patients with shunt systems undergo at least two shunt-revision surgeries within 10 years of implantation. A large portion of this high failure rate can be attributed to biofouling-related obstructions and infections. Previously, we developed flexible polyimide-based magnetic microactuators to remove obstructions formed on hydrocephalus shunts. To test the long-term …
Heating Element Including Carbon Nanotube (Cnt) Layer, Santhosh Kumar Loganathan, Virginie Rollin, Daewon Kim
Heating Element Including Carbon Nanotube (Cnt) Layer, Santhosh Kumar Loganathan, Virginie Rollin, Daewon Kim
Publications
Apparatus , materials , and techniques and techniques herein can include providing a deposited layer comprising a com posite material including carbon nanotubes ( CNTs ) . Accord ing to various examples , the composite can be applied to a substrate such as using a solution containing CNTs and other constituents such as sulfur . The solution can be spray applied to a substrate , or spin - coated upon a substrate , such as to provide a uniform , conductive , and optically - transpar ent film layer . In one application , such a film layer can be …
Swelling-Etching Characterization Of Copper (I) Oxide - Pdms For The Development Of Micro/Nano - Particles Composite Mems Corrosion Sensor, Abdoul Kader Maiga
Swelling-Etching Characterization Of Copper (I) Oxide - Pdms For The Development Of Micro/Nano - Particles Composite Mems Corrosion Sensor, Abdoul Kader Maiga
Graduate Theses and Dissertations
The primary objective for this thesis is to contribute to the understanding of the oxide removal process for a corrosion sensing device. The goal for designing such a device is for monitoring corrosion on metallic structures. The sensing material (6.35mm x 1mm discs) of the device is composed of copper (I) oxide particles mixed in some polydimethylsiloxane (PDMS). The PDMS, “housing,” is meant for controlling the oxidation rate through the sensing material. A solvent was used to facilitate the etchant diffusion through the PDMS matrix. Toluene and acetic acid were the ideal solvent and etchant, respectively, for carrying out the …
Mems Lab Simulation Tool, Oluwatosin D. Adeosun, Sambit Palit, Ankit Jain, Muhammad A. Alam
Mems Lab Simulation Tool, Oluwatosin D. Adeosun, Sambit Palit, Ankit Jain, Muhammad A. Alam
The Summer Undergraduate Research Fellowship (SURF) Symposium
MEMS actuators have multiple design applications. Understanding their behavior as well as the ability to predict their actuation characteristics and voltage response is important when designing these actuators. In order to know these devices will behave, designers have to solve multiple analytical equations and experiments that can be very time consuming. Over the course of the summer a tool was created on nanoHUB that will allow users to enter information about a MEMS actuator and provide the voltage response of the actuator. To create the tool, scaling equations were first provided for various geometry configurations and the equations were next …
Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan
Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan
Student Publications & Research
Ordered arrays of high-aspect-ratio micro/nanostructures in semiconductors stirred a huge scientific interest due to their unique one-dimensional physical morphology and the associated electrical, mechanical, chemical, optoelectronic, and thermal properties. Metal-assisted chemical etching enables fabrication of such high aspect ratio Si nanostructures with controlled diameter, shape, length, and packing density, but suffers from structure deformation and shape inconsistency due to uncontrolled migration of noble metal structures during etching. Hereby the authors prove that a Ti adhesion layer helps in stabilizing gold structures, preventing their migration on the wafer surface while not impeding the etching. Based on this finding, the authors demonstrate …
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical …
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Matteo Rinaldi
A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices are employed to …
Free Standing Gan Nano Membrane By Laser Liftoff Method, Liang Tang, Yuefeng Wang, Gary Cheng, Michael Manfra, Timothy Sands
Free Standing Gan Nano Membrane By Laser Liftoff Method, Liang Tang, Yuefeng Wang, Gary Cheng, Michael Manfra, Timothy Sands
Yuefeng Wang
In this work, we present a method able to fabricate thin GaN nanomembranes fit for device applications. Starting from commercial GaN on sapphire substrates, MBE was used to deposit a sacrificial layer, which comprises of a superlattice of InN/InGaN, after which thin a GaN film of hundreds of nanometers thickness was grown on top. Pulsed laser irridiation with photon energy of 2.3eV gives rise to the controlled decomposition of the sacrificial intermediate layer, which can be followed by easy separation of the top GaN membrane from the substrate. This process can be used to manufacture GaN membranes with low defect …