Mechanical Engineering Commons^™

Silicon Wafer Temperature Distribution, Daniel Gonzalez, Nathan Jones, Dylan Justice

Mechanical Engineering

Applied Materials is a global company that designs equipment for use in the semiconductor manufacturing industry. The scope of this project covers process chambers used for depositing thin chemical films onto silicon wafers. These processes must take place in particularly specific environments– including extremely low pressures and high temperatures. One challenge engineers face when designing these processes is carefully controlling the thermal behavior of silicon wafers. Typically, behavior is predicted using time consuming and computationally expensive CFD simulations. We have been asked to address this issue with a simpler, faster model which will allow engineers to reduce the total number …