Mechanical Engineering Commons^™

Development Of Microfabrication Process For Micro Inductive Sensors, Xueguang Han

Electronic Thesis and Dissertation Repository

Inductive position/angle sensors are widely used in vehicles and have very bright market prospects. However, the current sensor designs often suffer from high space consuming which increases the assembly size of vehicle parts. In addition, the high emission of traditional inductive sensors can cause the interference with other electronic components. In this dissertation, a novel and reliable microfabrication process was developed to fabricate a newly designed miniaturized inductive sensor for gas pedal use. The HFSS simulation has proved that the newly developed inductive sensor could provide sufficient sensitivity to meet the sensing requirements. The performance of the sensor was well …