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Full-Text Articles in Other Materials Science and Engineering
Electrostatic Quadrupole Plasma Mass Spectrometer Measurements During Thin Film Depositions Using Simultaneous Matrix Assisted Pulsed Laser Evaporation And Magnetron Sputtering, Chad N. Hunter, Michael H. Check, Christopher Muratore, Andrey A. Voevodin
Electrostatic Quadrupole Plasma Mass Spectrometer Measurements During Thin Film Depositions Using Simultaneous Matrix Assisted Pulsed Laser Evaporation And Magnetron Sputtering, Chad N. Hunter, Michael H. Check, Christopher Muratore, Andrey A. Voevodin
Chemical and Materials Engineering Faculty Publications
A hybrid plasma deposition process, combining matrix assisted pulsed laser evaporation (MAPLE) of carbon nanopearls (CNPs) with magnetron sputtering of gold was investigated for growth of composite films, where 100 nm sized CNPs were encapsulated into a gold matrix. Composition and morphology of such composite films was characterized with x-ray photoelectron spectroscopy, scanning electron microscopy, and transmission electron microscopy (TEM) analysis. Carbondeposits on a gold magnetron sputter target and carbon impurities in the gold matrices of depositedfilms were observed while codepositing from gold and frozen toluene-CNP MAPLE targets in pure argon. Electrostatic quadrupole plasma analysis was used to determine that …