Engineering Mechanics Commons^™

Vibration Analysis Of Piezoelectric Microcantilever Sensors, Amin Salehi-Khojin

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The main objective of this dissertation is to comprehensively analyze vibration characteristics of microcantilever-based sensors with application to ultra small mass detection and low dimensional materials characterization. The first part of this work focuses on theoretical developments and experimental verification of piezoelectric microcantilevers, commercially named Active Probes, which are extensively used in most today's advanced Atomic Force Microscopy (AFM) systems. Due to special geometry and configuration of Active Probes, especially multiple jump discontinuities in their cross-section, a general and comprehensive framework is introduced for forced vibration and modal analysis of discontinuous flexible beams. More specifically, a general formulation is obtained …