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Fabrication And Characterization Of Zirconium Oxide Thin Films, Vemnkata Rama Sesha Ravi Kumar Vemuri

Open Access Theses & Dissertations

Zirconium oxide (ZrO2) is an important material with a potential for a wide range of technological applications. The outstanding chemical stability, electrical and mechanical properties, high dielectric constant, and wide band gap of ZrO2 make it suitable for several industrial applications in the field of optics, electronics, magneto-electronics, and optoelectronics. ZrO2 is frequently used as a high refractive index material in multilayer optical coatings in high power laser systems. ZrO2 is employed in super plastic structural ceramics that demonstrate excellent strength and fracture toughness. ZrO2 has been considered as a promising dielectric to replace SiO2 in advanced metal oxide semiconductor …