Engineering Science and Materials Commons^™

Evaluating The Effects Of Granulated Rubber And Glass Fibers In Polymer Concrete As A Structural Material For Wafer Grinding Machines, Kevin Gabriel Kuehn, Philip Randall Streeter

Materials Engineering

Polymer concrete is a composite material used to replace cast iron and steel in wafer grinding machines for vibration damping. During the grinding and lapping processes of manufacturing silicon wafers, excessive vibrations may cause subsurface damage which requires additional polishing and reduces yield. Nine compositions containing various levels of granulated rubber and glass fibers were manufactured. CRM WRF-10 granulated rubber was examined at 0%, 5%, and 10% and Corning Cem-Fil glass fibers were added at 0%, 0.5%, and 1% by weight. Smooth-On EpoxAcast 690 epoxy resin was held constant at 16% for each composition. Crushed granite aggregate from Martin Marietta, …