Signal Processing Commons^™

Modulation Of Electrostatic Microelectromechanical Mirrors Using A Cmos Controller, Paul C. Rounsavall

Theses and Dissertations

Microelectromechanical Systems (MEMS) is a rapidly growing technology that lends itself particularly well to optical applications. An example of an optical MEMS device is the piston-action mirror that modulates the phase of reflected light. The phase of reflected light can be varied using thermal or electrostatic actuation to control the position of the mirror. In previous research, a modulation method to control thermally actuated mirrors was developed. This thesis presents the development, implementation, fabrication, and testing of a complimentary metal oxide semiconductor (CMOS) controller capable of directly interfacing between a digital system, such as a computer, and an electrostatically actuated …