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Nanoscience and Nanotechnology
Department of Electrical and Computer Engineering: Dissertations, Theses, and Student Research
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Generalized Ellipsometry Analysis Of Anisotropic Nanoporous Media: Polymer-Infiltrated Nanocolumnar And Inverse-Column Polymeric Films, Dan Liang
Department of Electrical and Computer Engineering: Dissertations, Theses, and Student Research
Characterization of the structural and optical properties is a subject of significance for nanoporous material research. However, it remains a challenge to find non-destructive methods for investigating the anisotropy of porous thin films with three-dimensional nanostructures. In this thesis, a generalized ellipsometry (GE) analysis approach is employed to study two types of anisotropic nanoporous media: slanted columnar thin films (SCTFs) with polymer infiltration and inverse-SCTF polymeric films. The thesis presents the physical properties obtained from GE analysis, including porosity, columnar shape, principal optical constants, birefringence, etc.
The thesis reports on using a GE analysis approach, combining the homogeneous biaxial layer …