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Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
A Semi-Empirical Model For Tilted-Gun Planar Magnetron Sputtering Accounting For Chimney Shadowing, Johnathan Bunn, C. Metting, Jason Hattrick-Simpers
A Semi-Empirical Model For Tilted-Gun Planar Magnetron Sputtering Accounting For Chimney Shadowing, Johnathan Bunn, C. Metting, Jason Hattrick-Simpers
Jason R. Hattrick-Simpers
No abstract provided.