Open Access. Powered by Scholars. Published by Universities.®
Electronic Devices and Semiconductor Manufacturing Commons™
Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 2 of 2
Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
Micro-Scale Flapping Wings For The Advancement Of Flying Mems, Nicholas R. Coleman
Micro-Scale Flapping Wings For The Advancement Of Flying Mems, Nicholas R. Coleman
Theses and Dissertations
This research effort presents conceptual micro scale air vehicles whose total dimensions are less than one millimeter. The initial effort was to advance the understanding of micro aerial vehicles at sub-millimeter dimensions by fabricating and testing micro scale flapping wings. Fabrication was accomplished using a surface micromachining process called PolyMUMPs™. Both rigid mechanical structures and biomimetic devices were designed and fabricated as part of this effort. The rigid mechanical structures focused on out of plane deflections with solid connections and assembling a multiple hinge wing structure through the aid of residual stress. These devices were actuated by double hot arm …
A Mems Multi-Cantilever Variable Capacitor On Metamaterial, Luke A. Rederus
A Mems Multi-Cantilever Variable Capacitor On Metamaterial, Luke A. Rederus
Theses and Dissertations
Negative refractive index materials are an example of metamaterials that are becoming increasingly popular. Research into these metamaterials could possibly be the first steps toward bending electromagnetic radiation (i.e., microwaves, light, etc.) around an object or person. Split ring resonators (SRR) are classified as metamaterials that create an artificial magnetic response from materials with no inherent magnetic properties. Once fabricated, an SRR has a specific resonant frequency due to its permanent geometry. This research introduces a new concept of using a variable capacitive micro- electro-mechanical system (MEMS) device located at the gap of an SRR to mechanically alter the capacitance …