Electronic Devices and Semiconductor Manufacturing Commons^™

Ultra-Fast And High Resolution Nems Thermal Detector Based On A Nano-Air-Gap Piezoelectric Resonant Structure, Yu Hui, Matteo Rinaldi

Matteo Rinaldi

This paper presents the theoretical modeling and experimental verification of an innovative Nano Electro Mechanical System (NEMS) technology suitable for the implementation of ultra-fast and high resolution un-cooled thermal detectors. Fundamental challenges associated to the implementation of mechanically resonant thermal detectors are overcome with the introduction of an innovative technology platform in which a temperature sensitive Aluminum Nitride (AlN) nano-plate resonator and a monolithically integrated micromachined suspended heat absorbing element are perfectly overlapped but separated by a sub-micron air gap. By placing the absorbing element outside the body of the resonator (but suspended over it) the electromechanical performance of the …