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Integrated Chirped-Grating Spectrometer-On-A-Chip, Shima Nezhadbadeh

Optical Science and Engineering ETDs

In this dissertation we demonstrate a new structure based on waveguide coupling atop a silicon wafer using a chirped grating to provide the dispersion that leads to a high-resolution, compact, fully integrable and CMOS-compatible spectrometer. Light is both analyzed and detected in a single, completely monolithic component which enables realizing a high-resolution portable spectrometer with an extremely compact footprint. The structure is comprised of a SiO₂/Si₃N₄/SiO₂ waveguide on top of a silicon wafer. Grating regions are fabricated on the top cladding of the waveguide. The input light is incident on a chirped grating …