Electromagnetics and Photonics Commons^™

Development Of A Monolithic Implantable Neural Interface From Cubic Silicon Carbide And Evaluation Of Its Mri Compatibility, Mohammad Beygi

USF Tampa Graduate Theses and Dissertations

One of the main issues with micron-sized intracortical neural interfaces (INIs) is their long-term reliability, with one major factor stemming from device material failure caused by the heterogeneous integration of multiple materials used to realize the implant. Single crystalline cubic silicon carbide (3C-SiC) is a semiconductor material that has been long recognized for its mechanical robustness and chemical inertness. It has the benefit of demonstrated biocompatibility, which makes it a promising candidate for chronically-stable, implantable INIs. In the first section of this dissertation, the fabrication and initial electrochemical characterization of a monolithic, Michigan-style 3C-SiC microelectrode array (MEA) probe is reported. …