Electrical and Electronics Commons^™

Analysis And Control Of Monolithic Piezoelectric Nano-Actuator, Xuemei Sun

Dissertations

The study of the monolithic piezoelectric actuator, the dominant type of micropositioner is an attractive and challenging area, where realtime control theory and digital signal processing are effectively applied. The actuator can be applied in precision instruments and precision control, such as microscopes, medical and optics instruments because of the piezoelectric ceramic's high resolution, fast transient response, and potential low cost. However, hysteresis nonlinearity and lightly damped vibration exist in the system, which limit the actuator applications.

This work focuses on the hysteresis characteristics in time and frequency domains along with experimental and simulated results to verify the effectiveness of …