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Full-Text Articles in Controls and Control Theory
Some Aspects Of Process Control In Semiconductor Manufacturing, Keelin Relihan, Shane Geraghty, Aidan O'Dwyer
Some Aspects Of Process Control In Semiconductor Manufacturing, Keelin Relihan, Shane Geraghty, Aidan O'Dwyer
Conference papers
This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.
Using Controller Tuning Formulae To Improve Performance, Aidan O'Dwyer
Using Controller Tuning Formulae To Improve Performance, Aidan O'Dwyer
Conference papers
The proportional integral derivative (PID) controller is the most dominant form of automatic controller in industrial use today. With this device, it is necessary to adjust the controller parameters according to the nature of the process. Thus, for effective control of a HVDC system, for example, specific values need to be chosen for the P, I and D parameters, which will be different for the values required to control, for example, an induction motor drive. This tailoring of controller to process is known as controller tuning. Controller tuning is easily and effectively performed using tuning rules (i.e. formulae for controller …