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Full-Text Articles in Controls and Control Theory
Real-Time Plasma Controlled Chemistry In A Two-Frequency, Confined Plasma Etcher, Vladimir Milosavljevic, Albert R. Ellingboe, Cezar Gaman, John V. Ringwood
Real-Time Plasma Controlled Chemistry In A Two-Frequency, Confined Plasma Etcher, Vladimir Milosavljevic, Albert R. Ellingboe, Cezar Gaman, John V. Ringwood
Articles
The physics issues of developing model-based control of plasma etching are presented. A novel methodology for incorporating real-time model-based control of plasma processing systems is developed. The methodology is developed for control of two dependent variables (ion flux and chemical densities) by two independent controls (27 MHz power and O2flow). A phenomenological physics model of the nonlinear coupling between the independent controls and the dependent variables of the plasma is presented. By using a design of experiment, the functional dependencies of the response surface are determined. In conjunction with the physical model, the dependencies are used to deconvolve the sensor …
Practical Sensor For Measurement Of Nitrogen, Dusan Popovic, Vladimir Milosavljevic, Steven Daniels
Practical Sensor For Measurement Of Nitrogen, Dusan Popovic, Vladimir Milosavljevic, Steven Daniels
Articles
This paper presents a method for precise measurement of atomic and molecular nitrogen in an oxygen-nitrogen dc plasma. This is achieved by monitoring the intensities of the atomic nitrogen spectral line at 821.6 nm and the molecular nitrogen bandhead at 337.1 nm, relative to the atomic oxygen spectral line at 844.7 nm. Oxygen is one of the most frequently used gases for surface chemical treatment, including deposition and etching, therefore the ability to measure and control the process and chemical composition of the process is essential. To validate this oxygen actimometry method for N2-xO2 (where x varies from 0 to …
On The Empirical Balanced Truncation For Nonlinear Systems, Marissa Condon, Rossen Ivanov
On The Empirical Balanced Truncation For Nonlinear Systems, Marissa Condon, Rossen Ivanov
Articles
Novel constructions of empirical controllability and observability gramians for nonlinear systems for subsequent use in a balanced truncation style of model reduction are proposed. The new gramians are based on a generalisation of the fundamental solution for a Linear Time-Varying system. Relationships between the given gramians for nonlinear systems and the standard gramians for both Linear Time-Invariant and Linear Time-Varying systems are established as well as relationships to prior constructions proposed for empirical gramians. Application of the new gramians is illustrated through a sample test-system.