Computer Engineering Commons^™

Power-Scavenging Mems Robots, Daniel J. Denninghoff

Theses and Dissertations

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was …