Computer Engineering Commons^™

Srrs Embedded With Mems Cantilevers To Enable Electrostatic Tuning Of The Resonant Frequency, E. A. Moore, Derrick Langley, Matthew E. Jussaume, L. A. Rederis, C. A. Lundell, Ronald A. Coutu Jr., Peter J. Collins, Lavern A. Starman

Electrical and Computer Engineering Faculty Research and Publications

A microelectromechanical systems (MEMS) cantilever array was monolithically fabricated in the gap region of a split ring resonator (SRR) to enable electrostatic tuning of the resonant frequency. The design consisted of two concentric SRRs each with a set of cantilevers extending across the split region. The cantilever array consisted of five beams that varied in length from 300 to 400 μm, with each beam adding about 2 pF to the capacitance as it actuated. The entire structure was fabricated monolithically to reduce its size and minimize losses from externally wire bonded components. The beams actuate one at a time, longest …