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Full-Text Articles in Computer Engineering
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Theses
The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net …
Performance Of Sensor Fusion For Vehicular Applications, Nikola Janevski
Performance Of Sensor Fusion For Vehicular Applications, Nikola Janevski
Graduate Theses, Dissertations, and Problem Reports
Sensor fusion is a key system in Advanced Driver Assistance Systems, ADAS. The perfor-
mance of the sensor fusion depends on many factors such as the sensors used, the kinematic
model used in the Extended Kalman Filter, EKF, the motion of the vehicles, the type of
road, the density of vehicles, and the gating methods. The interactions between parameters
and the extent to which individual parameters contribute to the overall accuracy of a sensor
fusion system can be difficult to assess.
In this study, a full-factorial experimental evaluation of a sensor fusion system based
on a real vehicle was performed. …