Chemical Engineering Commons^™

Porous Metal Oxide Materials Through Novel Fabrication Procedures, Nicholas Hendricks

Open Access Dissertations

Porous metal oxide materials, particularly those comprised of silica or titania, find use in many applications such as low-k dielectric materials for microelectronics as well as chemical sensors, micro/nanofluidic devices, and catalyst substrates. For this dissertation, the focus will be on the processing of porous metal oxide materials covering two subjects: hierarchical porosity exhibited over two discrete length scales and incorporation of functional nanomaterials. To generate the porous silica materials, the technique of supercritical carbon dioxide infusion (scCO2) processing was heavily relied upon. Briefly, the scCO2 infusion processing utilizes phase selective chemistries within a pre-organized amphiphilic block copolymer template using …

Layer-By-Layer Nanoassembly Combined With Microfabrication Techniques For Microelectronics And Microelectromechanical Systems, Jingshi Shi

Doctoral Dissertations

The objective of this work is to investigate the combination of layer-by-layer self-assembly with microfabrication technology and its applications in microelectronics and MEMS.

One can assemble, on a standard silicon wafer, needed multilayers containing different nanoparticles and polymers and then apply various micromanufacturing techniques to form microdevices with nanostructured elements.

Alternate layer-by-layer self-assembly of linear polyions and colloidal silica at elevated temperatures have been firstly studied by QCM and SEM. LbL self-assembly and photolithography were combined to fabricate an indium resistor. The RTA method was employed in the fabrication. Hot-embossing technique as a reasonably fast and moderately expensive technique was …