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Journal of the Microelectronic Engineering Conference

ARC

2017

Articles 1 - 3 of 3

Full-Text Articles in Engineering

Mgf2/Ta2o5 Anti Reflective Coating Multilayers For Amo Solar Cells, Dylan J. Mafrici May 2017

Mgf2/Ta2o5 Anti Reflective Coating Multilayers For Amo Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

No abstract provided.


Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici May 2017

Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

No abstract provided.


Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici May 2017

Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

A bi-layer anti reflection coating (ARC) composed of MgF2-Ta2O5 was designed using a rigorous mathematical approach and was experimentally tested on a commercial grade solar cell as a proof of concept that the coating can be applied to multi-junction solar cells. A reactive sputter process was used to sputter tantalum oxide and a thermal evaporation process was used for depositing magnesium chloride. The thickness values of each film were measured via profilometry, elipsometry, and reflectometry techniques. Elipsometry was also used to determine the film material’s respective index of refraction. Diffuse field reflectance measurements of each film were made using an …