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Full-Text Articles in Engineering
Mgf2/Ta2o5 Anti Reflective Coating Multilayers For Amo Solar Cells, Dylan J. Mafrici
Mgf2/Ta2o5 Anti Reflective Coating Multilayers For Amo Solar Cells, Dylan J. Mafrici
Journal of the Microelectronic Engineering Conference
No abstract provided.
Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici
Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici
Journal of the Microelectronic Engineering Conference
No abstract provided.
Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici
Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici
Journal of the Microelectronic Engineering Conference
A bi-layer anti reflection coating (ARC) composed of MgF2-Ta2O5 was designed using a rigorous mathematical approach and was experimentally tested on a commercial grade solar cell as a proof of concept that the coating can be applied to multi-junction solar cells. A reactive sputter process was used to sputter tantalum oxide and a thermal evaporation process was used for depositing magnesium chloride. The thickness values of each film were measured via profilometry, elipsometry, and reflectometry techniques. Elipsometry was also used to determine the film material’s respective index of refraction. Diffuse field reflectance measurements of each film were made using an …
Inorganic Arc For Use In Microlithography, David J. Stern
Inorganic Arc For Use In Microlithography, David J. Stern
Journal of the Microelectronic Engineering Conference
In this study silicon nitride has been seen to be an effective anti-reflective coating for use at wavelengths from 190 to 436mm. The report discusses effects of the film such as index of refraction, extinction coefficient, thickness, and stoichiometric composition for the application of ARC in microlithography.