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Design And Mathematical Modeling Of Cmos Compatible - Mems Microhotplate, Wafaa Elsayed Elbasty, Illani Bt Md Nawi, Mohd Haris Md Khir, Abdelaziz Yousif Ahmed
Design And Mathematical Modeling Of Cmos Compatible - Mems Microhotplate, Wafaa Elsayed Elbasty, Illani Bt Md Nawi, Mohd Haris Md Khir, Abdelaziz Yousif Ahmed
Information Sciences Letters
Current Microhotplates have large power consumptions, temperature uniformity problems, and are highly priced; additionally, special stages are required to be integrated with ICs. The modeling and design of a MEMS Microhotplate (MHP) using standard 0.18 μm IP4M CMOS process technology is discussed in this paper. The designed MHP is intended to achieve good temperature uniformity while dissipating little power. The MHP microbridges lengths are varied from 80 μm to 120 μm whereas the MHP microbridges widths are varied from 5 μm to 25 μm. The effect of the length and width are studied and three different lengths of micro heater …
Research On Dual-Antenna Gnss-Assisted Mins Navigation Method, Hailu Wang, Su Zhong, Liu Ning, Liu Hong, Guodong Fu
Research On Dual-Antenna Gnss-Assisted Mins Navigation Method, Hailu Wang, Su Zhong, Liu Ning, Liu Hong, Guodong Fu
Journal of System Simulation
Abstract: For the integrated navigation system of the single-antenna GNSS-assisted MEMS strap-down inertial navigation system (MINS), the heading angle divergence is invalid when the vehicle is stationary and linear motion, and the error is large. The method of the dual-antenna GNSS-assisted MINS integrated navigation based on EKF is proposed. The error state model is established, and the extended Kalman filter combined filter (EKF) algorithm is designsed for simulation verification. The driving test is carried out by comparing the high-precision SPAN-CPT. The results show that the yaw angle and pitch angle accuracy are 0.2 RMS, 0.3 RMS, which can be used …
Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Journal of the Microelectronic Engineering Conference
From Merriam-Webster dictionary, it states that peristalsis can best be described as "successive waves of involuntary contraction passing along the walls of a hollow muscular structure (such as the esophagus or intestine) and forcing the contents on- ward"[1]. The objective of this project was to create a peristaltic micropump at the Rochester Institute of Technology (RIT) Semiconductor and Microsystem Fabrication Laboratory (SMFL). Using Micro-Electro-Mechanical Systems (MEMS) to create a peristaltic pump to lower the energy used to move a uid through a tube. Using three single micro- machined micro-pumps in a straight line to create this type of action. Fabrication …
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Journal of the Microelectronic Engineering Conference
This paper focuses on the design and fabrication of a surface MEMS three-axis accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y-direction, and 5G in the z-direction on a single device using capacitve sensing. The fabrication process was performed in the Semiconductor and Microsystems Laboratory (SMFL), with a 7 level process flow to achieve the desired features. The accelerometer was designed to have a movable top electrode with sensing fingers attached to it to sense the change in capacitance the x/y-direction and a bottom electrode to sense the change in z-direction. The paper will focus on …
Electrostatically Actuated Mems Resonator, Daniel J.H. Shyer
Electrostatically Actuated Mems Resonator, Daniel J.H. Shyer
Journal of the Microelectronic Engineering Conference
No abstract provided.
Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer
Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer
Journal of the Microelectronic Engineering Conference
No abstract provided.
Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer
Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer
Journal of the Microelectronic Engineering Conference
A MEMS electrostatically actuated resonator with fixed-fixed and fixed-free cantilever beams is designed, simulated, fabricated, and tested. The fabrication of the MEMS resonators uses RIT’s MEMS fabrication 2016 process flow which is a surface micromachining process. The released fixed-free devices tested showed an increasing change in capacitance with an increasing actuation voltage. Inspection of the released fixed-fixed devices has a compressive stress in the second polysilicon film that causes the cantilever beam to bend above the actuation and sensing pads. Testing for resonance has not been successful. Some new considerations for the MEMS fabrication process and design are discussed.
Fabrication Of Electrostatically Actuated Mems Switch, Mattias Herrfurth
Fabrication Of Electrostatically Actuated Mems Switch, Mattias Herrfurth
Journal of the Microelectronic Engineering Conference
This paper summarizes the process of designing, fabricating, and analyzing a series of MEMS switches. These devices are composed of a mechanical conductive polysilicon material being brought into contact to a signal line so as to rectify it. The parameters altered between each switch include the number of arms anchoring the mechanical polysilicon to the substrate and various dimensional constants. These dimensional constants include values for the width and length of the arms, and the area of the electrodes used in the electrostatic operation. Two sets of devices were fabricated for this paper, and data was obtained for the advancement …
Design, Fabrication, And Testing Of A Mems Peltier Cooler (Tec- Thermoelectric Cooler), Brendan Merna
Design, Fabrication, And Testing Of A Mems Peltier Cooler (Tec- Thermoelectric Cooler), Brendan Merna
Journal of the Microelectronic Engineering Conference
In this paper, a MEMS Peltier Cooler was designed, fabricated, and tested to prove TEC (Thermoelectric Coolers) can be created with a fabrication process. Design was done using Mentor Graphics IC Station software, fabrication was done using a custom process, and testing was done using built in temperature sensors to observe the temperature difference between each side.
A New Calibration Method For Low Cost Mems Inertial Sensor Module, Sheng-Chih Shen, Chia-Jung Chen, Hsin-Jung Huang
A New Calibration Method For Low Cost Mems Inertial Sensor Module, Sheng-Chih Shen, Chia-Jung Chen, Hsin-Jung Huang
Journal of Marine Science and Technology
This paper presents a new calibration method to overcome the challenges of MEMS inertial sensors for underwater navigation. The MEMS inertial sensor module is composed of an accelerometer, a gyroscope and a circuit of signal process. For navigation estimation, it is easy to be influenced by errors which come from MEMS inertial sensors. In general, the sources of error can be categorized into two groups, deterministic type and stochastic type. The former primarily includes bias errors, misalignment and nonlinearity; the latter contains temperature effect and signal drifting. Subsequently, the linearity calibration is used to modify the deterministic error and the …
Mems Bio-Probe Devices For Monitoring Of Various Blood Properties, Jeffrey Traikoff
Mems Bio-Probe Devices For Monitoring Of Various Blood Properties, Jeffrey Traikoff
Journal of the Microelectronic Engineering Conference
A set of MEMS Bio-Probes is designed, fabricated over a five-week period, then packaged and tested for functionality. The devices were fabricated to near completion however they were not brought to a point where they could be electrically tested. The fabrication of the devices went remarkable well. This indicates that there is potential for the device to work as originally intended.
A Walking Silicon Robot, David W. Grund Jr, Lynn F. Fuller
A Walking Silicon Robot, David W. Grund Jr, Lynn F. Fuller
Journal of the Microelectronic Engineering Conference
The goal of this project was to design and implement a MEMS process for the creation of a walking silicon robot using the equipment available at RIT. An attempt was carried out to create a mobility system based on the thermal expansion of polyimide joints as demonstrated by Ebefors. The designed process was successfully implemented through the oxidation of the joint surfaces. Issues with the Al resistor and polyimide lithography prevented the successful completion of the rest of the process.
Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang
Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang
Journal of Electrochemistry
Accurate control and fabrication of silicon surface structures from atomic scale to micrometer scale,which may be randomly associated with surface roughness or have well defined patterns,is critical for the per-formance and reliability of electronic devices.Electrochemical reactions of silicon in solutions involved in wetcleaning and etching of silicon wafer play an importantrole in determining the structures of silicon surface.Atre-mendous amount of researches have been done in the last several decades to understand and control a range ofcomplex electrochemical reactions at silicon/solution interface and their relations to the resulted surface struc-tures.The findings generated from these research efforts have been compiled and integrated …
Development Of A Polysilicon Check Microvalve, William C. Hart
Development Of A Polysilicon Check Microvalve, William C. Hart
Journal of the Microelectronic Engineering Conference
Check valves are used frequently within the field of microfluidic MEMS, particularly in micropump applications. Check valves serve to limit the flow of a fluid to one direction through a channel. This project was an attempt to manufacture an efficient check microvalve using polysilicon as the valve cover material. Previous work on a microvalve at RIT has been unsuccessful, as the final KOH etch has attacked the polysilicon, thus removing the valves from the openings in the silicon. It was determined that pinholes in the LPCVD nitride were allowing KOH to penetrate the etch mask and attack the substrate surface …
Mems Based Light Modulator, Shushil Shakya
Mems Based Light Modulator, Shushil Shakya
Journal of the Microelectronic Engineering Conference
This paper presents a simple way to build a MEMS based light modulator. Here Aluminum ribbons are suspended in an air gap. An array of these Al ribbons can be used to act as a light modulator. Alternate Al ribbons are connected to a DC bias of 50V which will curve downwards due to the stress applied and electrostatic attraction. Thus, the light intensity can be modulated to any shade of gray needed or even turn it off completely. Different sizes of light modulators were built using Mentor Graphics and were fabricated in the RIT, SMFL. Final results did not …
Investigation And Development Of Air Bridges, Jay Cabacungan
Investigation And Development Of Air Bridges, Jay Cabacungan
Journal of the Microelectronic Engineering Conference
A study was done in order to develop a fabrication process for creating air bridges at RIT’s Semiconductor and Microsystems Fabrication Laboratory (SMFL). Process development looked at three key factors (i) a robust lithography process that would produce the necessary rounded profile for fabricating air bridges (ii) sputter deposition vs. evaporation as metal deposition techniques (iii) the strength of the structures by testing the maximum distance an air bridge could span, the minimum and maximum thickness the structure could support, and the dimensions of the support posts. Several samples were fabricated testing the three different factors studied and SEM micrographs …
Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley
Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley
Journal of the Microelectronic Engineering Conference
A simple, MEMS base micro-chemical detector utilizing the principles of gas ionization, has been designed and fabricated. The device contains a polysilicon micro air-bridge heater structure with integrated polysilicon electrodes. The design of the devices allows it not only functions via thermionic emission, but also via chemi-ionization if a proper Pt catalyst is applied and it is operated in an environment containing hydrogen. When properly biased the device has been shown to heat to high temperatures where thermionic emission can begin to occur. Hydrocarbon chemicals in the gas phase have shown to ionize, via thermionic ionization and have been collected, …
Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang
Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang
Journal of the Microelectronic Engineering Conference
A surface micromachined MEMS gas flow sensor has been fabricated and tested. The fabrication process of the device was presented. The heater glowed red hot when a voltage of 27V was applied if the underlying LTO was completely etched away. Both the upstream and downstream resistors changed when temperature changed. A proof of concept showing that output voltage changes with gas flow was shown.
Design And Analysis Of A Cmos Based Mems Accelerometer, Matthew A. Zeleznik
Design And Analysis Of A Cmos Based Mems Accelerometer, Matthew A. Zeleznik
Journal of the Microelectronic Engineering Conference
Traditionally, microelectromechanical systems (MEMS) have been fabricated using standard surface micromachining or bulk micromachining processes with prior or subsequent CMOS incorporation. Recently, a new hybrid technique known as CMOS enicromachining has been developed allowing for parallel fabrication of mechanical and electrical components. A single axis and dual axis accelerometer have been designed for submission for an ASIMPS alpha run using the CMOS micromachining process. Electrical and mechanical analysis and simulations for the single axis accelerometer have been performed. The sensitivity of the single axis accelerometer has been calculated to be 19.66mV/g neglecting the effects of parasitic capacitance. The released die …
Characterization Of Su-8 5 For Mems Applications, Sean Corcoran
Characterization Of Su-8 5 For Mems Applications, Sean Corcoran
Journal of the Microelectronic Engineering Conference
SIJ-8 is a negative photoresist that is mainly used for MEMS technology. It is currently being used l~r micro-machined gears, accelerometers, and host of other MEMS structures. In these types of MEMS devices it is important to get an image with nearly vertical sidewall angles. For example with a micromachined gear, the gear would slip easily if the gears sidewall angle not near vertical. The focus of this project was to model the sidewall angle through a designed experiment and an ANOVA was run on the data using a computer program. Also, using a linear regression analysis the functionality of …
Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Journal of Electrochemistry
Microsystem or micro electromechanical system (MEMS) is briefly introduced. The electrochemical applications in microsystem are reviewed and prospective applications of microsystem in electrochemistry are discussed. Along with the rapid development of micro_ analytical chemical systems or lab_on_chips in 21st century, electrochemistry may play an increasingly important role in microsystem technology.
Investigation Of Silicon Etching Effects For Monolithic Integration Of Mems With Cmos, Matthew J. Daniello
Investigation Of Silicon Etching Effects For Monolithic Integration Of Mems With Cmos, Matthew J. Daniello
Journal of the Microelectronic Engineering Conference
Monolithic integration of CMOS and MEMS is quickly proving to be a viable asset to current complex structures. However, synthesis of these technologies has proven to have multiple processing obstacles. Depending on the method used to create these devices, the hurdles include the effects of silicon etching and high temperature processing. For this experiment, previously processed CMOS wafers were obtained and a trench was etched into the silicon. “Family of curves” plots of the working CMOS wafers were taken before and after processing to study any changes in ID. Results have shown that the processing of this integration will …