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Design, Fabrication, And Testing Of A Mems Peltier Cooler (Tec- Thermoelectric Cooler), Brendan Merna
Design, Fabrication, And Testing Of A Mems Peltier Cooler (Tec- Thermoelectric Cooler), Brendan Merna
Journal of the Microelectronic Engineering Conference
In this paper, a MEMS Peltier Cooler was designed, fabricated, and tested to prove TEC (Thermoelectric Coolers) can be created with a fabrication process. Design was done using Mentor Graphics IC Station software, fabrication was done using a custom process, and testing was done using built in temperature sensors to observe the temperature difference between each side.