Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 2 of 2
Full-Text Articles in Entire DC Network
Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang
Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang
Journal of Electrochemistry
Accurate control and fabrication of silicon surface structures from atomic scale to micrometer scale,which may be randomly associated with surface roughness or have well defined patterns,is critical for the per-formance and reliability of electronic devices.Electrochemical reactions of silicon in solutions involved in wetcleaning and etching of silicon wafer play an importantrole in determining the structures of silicon surface.Atre-mendous amount of researches have been done in the last several decades to understand and control a range ofcomplex electrochemical reactions at silicon/solution interface and their relations to the resulted surface struc-tures.The findings generated from these research efforts have been compiled and integrated …
Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Journal of Electrochemistry
Microsystem or micro electromechanical system (MEMS) is briefly introduced. The electrochemical applications in microsystem are reviewed and prospective applications of microsystem in electrochemistry are discussed. Along with the rapid development of micro_ analytical chemical systems or lab_on_chips in 21st century, electrochemistry may play an increasingly important role in microsystem technology.