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Full-Text Articles in Physics
Monolayer Doping Of Silicon-Germanium Alloys: A Balancing Act Between Phosphorus Incorporation And Strain Relaxation, Noel Kennedy, Ray Duffy, Gioele Mirabelli, Luke Eaton, Nikolay Petkov, Justin D. Holmes, Chris Hatem, Lee Walsh, Brenda Long
Monolayer Doping Of Silicon-Germanium Alloys: A Balancing Act Between Phosphorus Incorporation And Strain Relaxation, Noel Kennedy, Ray Duffy, Gioele Mirabelli, Luke Eaton, Nikolay Petkov, Justin D. Holmes, Chris Hatem, Lee Walsh, Brenda Long
Cappa Publications
This paper presents the application of monolayer doping (MLD) to silicon-germanium (SiGe). This study was carried out for phosphorus dopants on wafers of epitaxially grown thin films of strained SiGe on silicon with varying concentrations of Ge (18%, 30%, and 60%). The challenge presented here is achieving dopant incorporation while minimizing strain relaxation. The impact of high temperature annealing on the formation of defects due to strain relaxation of these layers was qualitatively monitored by cross-sectional transmission electron microscopy and atomic force microscopy prior to choosing an anneal temperature for the MLD drive-in. Though the bulk SiGe wafers provided are …
Subwavelength Grating-Based Spiral Metalens For Tight Focusing Of Laser Light, Victor V. Kotlyar, Sergey S. Stafeev, Anton G. Nalimov, Liam O'Faolain
Subwavelength Grating-Based Spiral Metalens For Tight Focusing Of Laser Light, Victor V. Kotlyar, Sergey S. Stafeev, Anton G. Nalimov, Liam O'Faolain
Cappa Publications
In this paper, we investigate a 16-sector spiral metalens fabricated on a thin film (130 nm) of amorphous silicon, consisting of a set of subwavelength binary diffractive gratings and with a numerical aperture that is close to unity. The metalens converts linearly polarized incident light into an azimuthally polarized optical vortex and focuses it at a distance approximately equal to the wavelength of the incident light, k ¼ 633 nm. Using a scanning near-field optical microscope, it is shown experimentally that the metalens forms an elliptical focal spot with diameters smaller than the diffraction limit: FWHMx ¼ 0.32k (60.03k) and …