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Image Degradation Due To Surface Scattering In The Presence Of Aberrations, Narak Choi

Electronic Theses and Dissertations

This dissertation focuses on the scattering phenomena by well-polished optical mirror surfaces. Specifically, predicting image degradation by surface scatter from rough mirror surfaces for a two-mirror telescope operating at extremely short wavelengths (9nm~30nm) is performed. To evaluate image quality, surface scatter is predicted from the surface metrology data and the point spread function in the presence of both surface scatter and aberrations is calculated. For predicting the scattering intensity distribution, both numerical and analytic methods are considered. Among the numerous analytic methods, the small perturbation method (classical Rayleigh-Rice surface scatter theory), the Kirchhoff approximation method (classical BeckmanKirchhoff surface scatter theory), …